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http://dx.doi.org/10.7736/KSPE.2013.30.12.1237

The Effect of Ultrasonic Vibration Table on ELID Grinding Process of Aluminum Nitride Ceramics  

Kwak, Tea-Soo (Department of Mechanical Engineering, Gyeongnam National University of Science and Technology)
Jung, Myung-Won (Department of Mechanical Engineering, Gyeongnam National University of Science and Technology)
Kim, Geon-Hee (Center for Analytical Instrumentation Development, Korea Basic Science Institute)
Kwak, Ihn-Sil (Faculty of Marine Technology, Chonnam National University)
Publication Information
Journal of the Korean Society for Precision Engineering / v.30, no.12, 2013 , pp. 1237-1243 More about this Journal
Abstract
This study has focused on the effect of ultrasonic vibration table in ELID grinding process of aluminum nitride ceramics. Aluminum nitride ceramics has superior physical and chemical properties and widely used in IC, LSI substrate, package and so on. To achieve the high effective machining of brittle and high strength ceramics as like aluminum nitride, machining method combined ELID grinding and ultrasonic vibration has been adopted in this study. From the experimental results, material removal rate, MRR has been increased maximum 36 percent and spindle resistance has been decreased in using ultrasonic table. Surface roughness of ground surface became a little worse in using ultrasonic table but was somewhat improved in feed direction.
Keywords
Aluminum Nitride; ELID Grinding; Ultrasonic Vibration Table; ELID Dressing Current; Material Removal Rate;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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