소성∙가공 (Transactions of Materials Processing)

  • 제22권1호
  • /
  • Pages.36-41
  • /
  • 2013
  • /
  • 1225-696X(pISSN)
  • /
  • 2287-6359(eISSN)
한국소성∙가공학회 (The Korean Society for Technology of Plasticity and materials processing)
권호 표지
DOI QR코드

DOI QR Code

반응표면법을 이용한 초음파 임프린팅 공정의 최적화

Optimization of Ultrasonic Imprinting Using the Response Surface Method

  • Jung, W.S. (Dept. Mechanical System Design Engineering, Seoul National Univ. Sci. Technol.) ;
  • Cho, Y.H. (Dept. Mechanical System Design Engineering, Seoul National Univ. Sci. Technol.) ;
  • Park, K. (Dept. Mechanical System Design Engineering, Seoul National Univ. Sci. Technol.)
  • 투고 : 2012.12.18
  • 심사 : 2013.01.09
  • 발행 : 2013.02.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

The present study examines the micro-pattern replication on a plastic film using ultrasonic imprinting. Ultrasonic imprinting uses ultrasonic waves to generate repetitive microscale deformation in the polymer film. The resulting deformation heat on the surface of the film causes the surface region to soften sufficiently so that a replication of the micro-pattern can be obtained. To successfully replicate the micro-pattern on a large area of polymer film, a high replication ratio is needed as well as good uniformity over the entire region. In this study, a horn design is investigated by finite element analysis and is optimized through a response surface analysis. In the ultrasonic imprinting experiments, the response surface method was also used to determine the optimal processing conditions for better replication characteristics.

키워드

참고문헌

  1. J. Becker, U. Heim, 2000, Hot Embossing as a Method for the Fabrication of Polymer High Aspect Ratio Structures, Sens. Actuators, A, Vol. 83, No. 1-3, pp. 130-135. https://doi.org/10.1016/S0924-4247(00)00296-X
  2. S. Kim, C. S. Shiau, B. Kim, D. Yao, 2007, Injection Molding Nanoscale Features with the Aid of Induction Heating, Polym. Plast. Technol. Eng., Vol. 46, pp. 1031-1037. https://doi.org/10.1080/03602550701522344
  3. J. H. Kim, Y. S. Kim, 2010, The Review for Various Mold Fabrication Toward Economical Imprint Lithography, J. Kor. Vac. Soc., Vol. 19, No. 2, pp. 96-104. https://doi.org/10.5757/JKVS.2010.19.2.096
  4. S. J. Liu, Y. T. Dung, 2005, Hot Embossing Precise Structure Onto Plastic Plates by Ultrasonic Vibration, Polym. Eng. Sci., Vol. 45, No.7, pp. 1282-1287.
  5. H. Mekaru, H. Goto, M. Takahashi, 2007, Development of Ultrasonic Micro Hot Embossing Technology, Microelectron. Eng., Vol. 84, No. 5-8, pp. 1282-1287. https://doi.org/10.1016/j.mee.2007.01.235
  6. W. Michaeli, A. Spennemann, R. Gartner, 2002, New Plastification Concepts for Micro Injection Molding, Microsyst. Technol., Vol. 8, No. 1, pp. 55-57. https://doi.org/10.1007/s00542-001-0143-9
  7. M. Harutaka, N. Toshihiko, G. Hiroshi, T. Masaharu, 2007, Nanoimprint Lithography Combined with Ultrasonic Vibration on Polycarbonate, Jpn. J. Appl. Phys., Vol. 46, No. 9B, pp. 6335-6362. https://doi.org/10.1143/JJAP.46.6335
  8. Y. S. Seo, K. Park, 2012, Direct Patterning of Micro-features on a Polymer Substrate using Ultrasonic Vibration, Microsyst. Technol., Vol. 18, No. 12, pp. 2053-2061. https://doi.org/10.1007/s00542-012-1524-y
  9. Y. S. Seo, K. Y. Lee, K. Park, 2012, Effect of Material Flow Direction on the Replication Characteristics of the Ultrasonic Patterning Process, Trans. Mater. Process., Vol. 21, No. 2, pp. 119-125. https://doi.org/10.5228/KSTP.2012.21.2.119
  10. W. Jung, J. Ra, K. Park, 2012, Design Optimization of an Ultrasonic Horn for Micro-pattern Replication, Int. J. Precis. Eng. Manuf., Vol. 13, No. 12, pp. 2195-2201. https://doi.org/10.1007/s12541-012-0291-0