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http://dx.doi.org/10.5228/KSTP.2013.22.1.36

Optimization of Ultrasonic Imprinting Using the Response Surface Method  

Jung, W.S. (Dept. Mechanical System Design Engineering, Seoul National Univ. Sci. Technol.)
Cho, Y.H. (Dept. Mechanical System Design Engineering, Seoul National Univ. Sci. Technol.)
Park, K. (Dept. Mechanical System Design Engineering, Seoul National Univ. Sci. Technol.)
Publication Information
Transactions of Materials Processing / v.22, no.1, 2013 , pp. 36-41 More about this Journal
Abstract
The present study examines the micro-pattern replication on a plastic film using ultrasonic imprinting. Ultrasonic imprinting uses ultrasonic waves to generate repetitive microscale deformation in the polymer film. The resulting deformation heat on the surface of the film causes the surface region to soften sufficiently so that a replication of the micro-pattern can be obtained. To successfully replicate the micro-pattern on a large area of polymer film, a high replication ratio is needed as well as good uniformity over the entire region. In this study, a horn design is investigated by finite element analysis and is optimized through a response surface analysis. In the ultrasonic imprinting experiments, the response surface method was also used to determine the optimal processing conditions for better replication characteristics.
Keywords
Ultrasonic Imprinting; Micro-pattern Replication; Response Surface Method; Finite Element Analysis;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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1 J. H. Kim, Y. S. Kim, 2010, The Review for Various Mold Fabrication Toward Economical Imprint Lithography, J. Kor. Vac. Soc., Vol. 19, No. 2, pp. 96-104.   과학기술학회마을   DOI   ScienceOn
2 S. J. Liu, Y. T. Dung, 2005, Hot Embossing Precise Structure Onto Plastic Plates by Ultrasonic Vibration, Polym. Eng. Sci., Vol. 45, No.7, pp. 1282-1287.
3 H. Mekaru, H. Goto, M. Takahashi, 2007, Development of Ultrasonic Micro Hot Embossing Technology, Microelectron. Eng., Vol. 84, No. 5-8, pp. 1282-1287.   DOI   ScienceOn
4 W. Michaeli, A. Spennemann, R. Gartner, 2002, New Plastification Concepts for Micro Injection Molding, Microsyst. Technol., Vol. 8, No. 1, pp. 55-57.   DOI   ScienceOn
5 M. Harutaka, N. Toshihiko, G. Hiroshi, T. Masaharu, 2007, Nanoimprint Lithography Combined with Ultrasonic Vibration on Polycarbonate, Jpn. J. Appl. Phys., Vol. 46, No. 9B, pp. 6335-6362.   DOI
6 Y. S. Seo, K. Park, 2012, Direct Patterning of Micro-features on a Polymer Substrate using Ultrasonic Vibration, Microsyst. Technol., Vol. 18, No. 12, pp. 2053-2061.   DOI
7 Y. S. Seo, K. Y. Lee, K. Park, 2012, Effect of Material Flow Direction on the Replication Characteristics of the Ultrasonic Patterning Process, Trans. Mater. Process., Vol. 21, No. 2, pp. 119-125.   DOI   ScienceOn
8 W. Jung, J. Ra, K. Park, 2012, Design Optimization of an Ultrasonic Horn for Micro-pattern Replication, Int. J. Precis. Eng. Manuf., Vol. 13, No. 12, pp. 2195-2201.   DOI   ScienceOn
9 J. Becker, U. Heim, 2000, Hot Embossing as a Method for the Fabrication of Polymer High Aspect Ratio Structures, Sens. Actuators, A, Vol. 83, No. 1-3, pp. 130-135.   DOI   ScienceOn
10 S. Kim, C. S. Shiau, B. Kim, D. Yao, 2007, Injection Molding Nanoscale Features with the Aid of Induction Heating, Polym. Plast. Technol. Eng., Vol. 46, pp. 1031-1037.   DOI   ScienceOn