Journal of IKEEE (전기전자학회논문지)

Institute of Korean Electrical and Electronics Engineers (한국전기전자학회)
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A 4H-SiC Trench MOS Barrier Schottky (TMBS) Rectifier using the trapezoid mesa and the upper half of sidewall

Trapezoid mesa와 Half Sidewall Technique을 이용한 4H-SiC Trench MOS Barrier Schottky(TMBS) Rectifier

  • Received : 2013.10.24
  • Accepted : 2013.11.20
  • Published : 2013.12.30
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Abstract

In this study, an 4H-SiC Trench MOS Barrier Schottky (TMBS) rectifier which utilizes the trapezoid mesa structure and the upper half of the trench sidewall is proposed to improve the forward voltage drop and reverse blocking voltage concurrently. The proposed 4H-SiC TMBS rectifier reduces the forward voltage drop by 12% compared to the conventional 4H-SiC TMBS rectifier with the tilted sidewall and improves the reverse blocking voltage by 11% with adjusting the length of the upper sidewall. The Silvaco T-CAD was used to analyze the electrical characteristics.

본 논문에서는 전력반도체 소자의 재료로써 주목받고 있는 탄화규소 기반의 Trench MOS Barrier Schottky(TMBS)의 순방향 및 역방향 특성을 개선시키기 위한 구조를 제안한다. 순방향 전압강하와 역방향 항복전압을 개선시키기 위하여 사다리꼴 mesa 구조와 trench sidewall의 길이를 조절하는 기법을 사용하는 4H-SiC TMBS 정류기를 제안하고 있다. 제안된 구조는 사다리꼴 mesa 구조를 적용하여 trench sidewall에 경사를 줌으로써 1508V의 역방향 항복전압을 얻었다. 이것은 기존의 4H-SiC TMBS 정류기에 비하여 역방향 항복전압을 11% 개선시켰음을 나타낸다. 또한 trench sidewall 상단의 길이를 조절하여 순방향 전류 $200A/cm^2$에 대하여 12% 감소된 1.6V의 순방향 전압강하를 얻었다. 제안된 소자는 Silvaco사의 T-CAD를 사용하여 전기적 특성을 분석하였다.

Keywords

References

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