한국해양공학회지 (Journal of Ocean Engineering and Technology)

  • 제27권6호
  • /
  • Pages.95-99
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  • 2013
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  • 1225-0767(pISSN)
  • /
  • 2287-6715(eISSN)
한국해양공학회 (Korean Society of Ocean Engineers)
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에어로졸 증착법에 의한 압전 PZT 후막의 제조

Fabrication of piezoelectric PZT thick film by aerosol deposition method

  • 김기훈 (부경대학교 재료공학과) ;
  • 방국수 (부경대학교 신소재시스템공학과) ;
  • 박찬 (부경대학교 재료공학과)
  • Kim, Ki-Hoon (Department of Materials Science and Engineering, Pukyong National University) ;
  • Bang, Kook-Soo (Department of Advanced Materials system Engineering, Pukyong National University) ;
  • Park, Chan (Department of Materials Science and Engineering, Pukyong National University)
  • 투고 : 2013.06.24
  • 심사 : 2013.12.18
  • 발행 : 2013.12.31
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초록

Lead zirconate titanate (PZT) thick films with a thickness of $10-20{\mu}m$ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of $1-2{\mu}m$, was observed using SEM. The average diameter ($d_{50}$) was $1.1{\mu}m$. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of $700^{\circ}C$. A 20-${\mu}m$ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.

키워드

참고문헌

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피인용 문헌

  1. Electrical properties of piezoelectric PZT thick film by aerosol deposition method vol.25, pp.6, 2015, https://doi.org/10.6111/JKCGCT.2015.25.6.239