Journal of the Korea Academia-Industrial cooperation Society (한국산학기술학회논문지)

The Korea Academia-Industrial cooperation Society (한국산학기술학회)
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Simulation Software for Semiconductor Photolithography Equipment: TrackSim

반도체 포토 장비의 시뮬레이션 소프트웨어: TrackSim

  • Yoon, Hyun-Joong (Faculty of Mechanical and Automotive Engineering, Catholic University of Daegu) ;
  • Kim, Jin-Gon (Faculty of Mechanical and Automotive Engineering, Catholic University of Daegu)
  • 윤현중 (대구가톨릭대학교 기계자동차공학부) ;
  • 김진곤 (대구가톨릭대학교 기계자동차공학부)
  • Received : 2012.02.09
  • Accepted : 2012.08.09
  • Published : 2012.08.31
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Abstract

This paper describes the development of the TrackSim, which is a discrete event simulation tool for photolithography equipment of semiconductor industry. The TrackSim is focused on the accurate simulation model of the photolithography equipment and easy-to-use user interfaces. TrackSim provides 3D simulation environment for evaluating, validating, and scheduling the photolithography process. One of the major characteristics of TrackSim is in that it is developed based on Applied Materials' AutoMod, a discrete event simulation software broadly used in semiconductor industry. Accordingly, the photolithography model of TrackSim can be used to perform simulation connected with other simulation models built with AutoMod.

본 논문은 반도체 포토장비의 이산 이벤트 시뮬레이터인 TrackSim의 개발에 관한 것이다. TrackSim은 포토 장비의 시뮬레이션 엔진과 사용하기 쉬운 사용자 환경을 포함하는 시뮬레이터로, 다양한 프로세스 모듈의 구성 및 운영 방법을 효율적으로 평가, 검증, 스케쥴링할 수 있는 3차원 시뮬레이션 환경을 제공한다. TrackSim은 반도체 산업에서 많이 사용되는 이산 사건 시뮬레이션 소프트웨어인 AutoMod를 기반으로 개발되어 시뮬레이션 신뢰성이 보장되며, AutoMod로 개발된 반도체 제조라인 시뮬레이션 모델 속에 함께 연동하여 사용이 가능하다는 특징이 있다.

Keywords

References

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