참고문헌
- Ivor, I. and Julius, J. M., "The Physics of Micro/Nano-fabrication," Plenum Press, 1992.
- Kaesmaier, R. and Loschner, H., "Ion Projection Lithography: Progress of European MEDEA & International Program," Microelectron. Eng., Vol. 53, No. 1, pp. 37-45, 2000. https://doi.org/10.1016/S0167-9317(00)00263-X
- Frey, L., Lehrer, C. and Ryssel, H., "Nanoscale Effects in Focused Ion Beam Processing," Appl. Phys. A, Vol. 76, No. 7, pp. 1017-1023, 2003. https://doi.org/10.1007/s00339-002-1943-1
- Matsui, S., "Three-dimensional nanostructure fabrication by focused ion beam chemical vapour deposition," Springer Handbook of Nanotechnology, pp. 211-229, 2010.
- Young, R. J., Cleaver, J. R. A. and Ahmed, H., "Characteristics of gas-assisted focused ion beam etching," J. Vac. Sci. Technol. B, Vol. 11, No. 2, pp. 234-241, 1993. https://doi.org/10.1116/1.586708
- Kim, H. B. and Noh, S. L., "The Characteristics of focused ion beam utilized mold fabrication on the micro/nano scale," Journal of the Korean Society for Precision Engineering, Vol. 28, No. 8, pp. 966-974, 2011.
- Kim, H. B., Hobler, G., Steiger, A., Lugstein, A. and Bertagnolli, E., "Level set approach for the simulation of focused ion beam processing on the micro/nano scale," Nanotechnology, Vol. 18, No. 26, Paper No. 265307, 2007.
- Kim, H. B., Hobler, G., Steiger, A., Lugstein, A. and Bertagnolli, E., "Full three-dimensional simulation of focused ion beam micro/nanofabrication," Nanotechnology, Vol. 18, No. 24, Paper No. 245303, 2007.
- Vasile, M. J., Xie, J. and Nassar, R. J., "Depth control of focused ion-beam milling a numerical model of the sputtered process," J. Vac. Sci. Technol. B, Vol. 17, No. 6, pp. 3085-3090, 1999. https://doi.org/10.1116/1.590959
- Kang, E. G., Kim, H. S., Kim, J. S., Lee, D. Y. and Lee, S. W., "Trends on the application of High density electron beam process," Proc. of KSPE Spring Conference, pp. 215-216, 2011.
- Danilatos, G. D., "An atmospheric scanning electron microscope (ASEM)," Scanning, Vol. 3, No. 3, pp. 215-217, 1980. https://doi.org/10.1002/sca.4950030314
- Smith, R., "Atom & ion collision in solids and at surfaces," Cambridge University Press, 1997.
- Eckstein, W., "Computer simulation of Ion-Solid Interactions," Springer-Verlag, 1991.
- Wikipedia, "Scanning electron microscope," http://en.wikipedia.org/wiki/Scanning_electron_microscope
- Assa'd, A., "Backscattering coefficients for low energy electrons," Scanning Microsc., Vol. 12, No. 1, pp. 185-192, 1998.
- Williamson, W. and Antolak, A. J., "Monte Carlo calculation of electron scattering from surface films," J. Appl. Phys., Vol. 58, No.10, pp. 3687-3691, 1985. https://doi.org/10.1063/1.335629
- Kim, H. B. and Mazzouz, M., "Investigation of Imaging characteristic using E-SEM," FEI Company, 2008.
피인용 문헌
- Analysis of Heat Generation Induced by Electron Impact in X-Ray Tube Using FEM and Monte Carlo Method vol.32, pp.4, 2015, https://doi.org/10.7736/KSPE.2015.32.4.387