Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Effects of Sintering Temperature on the Electrical Conductivities of the Y2O3-Carbon Composites

Y2O3-카본 복합체의 전기전도성에 미치는 소결온도의 영향

  • 최관영 (인하대학교 신소재공학부) ;
  • 오윤석 (한국세라믹기술원 이천분원 엔지니어링세라믹센터) ;
  • 김성원 (한국세라믹기술원 이천분원 엔지니어링세라믹센터) ;
  • 김형순 (인하대학교 신소재공학부) ;
  • 박종훈 ((주)코미코) ;
  • 이성민 (한국세라믹기술원 이천분원 엔지니어링세라믹센터)
  • Received : 2012.01.09
  • Accepted : 2012.02.23
  • Published : 2012.03.31
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Abstract

The $Y_2O_3$ ceramics have been widely used as plasma resistant materials in the semiconductor industry. In this study, composites made of plasma resistant $Y_2O_3$ and electrically conductive carbon have been produced. The electrical properties of this composite were measured with respect to the size, volume fraction of the conductive carbon phase, and sintering temperature. When micro-sized carbon was used, the composites were insulating up to 5 wt% addition of the carbon. However, when nano-sized carbon of around 60 ~100 nm was used, the composites became conductive over threshold volume fraction of carbon, which increased with increasing sintering temperature. This behavior of electrical conductivity of the composites was discussed in terms of the percolation theory. The percolation threshold of the conductivity seemed to be affected by the grain growth and coalescences of dispersed conductive carbon phases with grain growth of matrix $Y_2O_3$.

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References

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