Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Electrical Properties of Large Alumina Ceramics Prepared by Various Processing

제조 공정별 대형 알루미나 세라믹스의 전기적 특성

  • Cho, Kyeong-Sik (School of Advanced Materials and System Engineering, Kumoh National Institute of Technology) ;
  • Lee, Hyun-Kwuon (School of Advanced Materials and System Engineering, Kumoh National Institute of Technology) ;
  • Park, Young-Il (School of Advanced Materials and System Engineering, Kumoh National Institute of Technology) ;
  • Kim, Mi-Young (Wonik Quartz Co.)
  • 조경식 (금오공과대학교 신소재시스템공학부) ;
  • 이현권 (금오공과대학교 신소재시스템공학부) ;
  • 박용일 (금오공과대학교 신소재시스템공학부) ;
  • 김미영 ((주)원익쿼츠)
  • Received : 2012.02.06
  • Accepted : 2012.03.07
  • Published : 2012.03.31
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Abstract

The size of various alumina ceramics used in semiconductor and display industry is required to increase with increase in wafer and panel size. In this research, large alumina ceramics were fabricated by uniaxial pressing, cold isostatic pressing and filter pressing with commercial powder and thereafter sintering at $1600^{\circ}C$ in gas furnace. The large alumina ceramics exhibited dense microstructure corresponding to 98.5% of theoretical density and 99.8% of high purity. The impurities and microstructural defects of the alumina were found to influence the resistance and dielectric properties. The volume resistances in these four aluminas were almost the same while the pure alumina was higher value. The dielectric constant, dielectric loss and dielectric strength of aluminas were placed within the range of 10.3~11.5, 0.018~0.036, and 10.1~12.4 kV/mm, respectively.

Keywords

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