• Korean Management Science Review
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• v.29 no.1
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• pp.131-141
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• 2012

The automated material handling systems today are playing ever more important roles in semiconductor/LCD fabrication facilities. Recently they became more flexible, intelligent, and speedy than in the past. The facilities have been fully automated because the size and weight of the unit loads used in the facilities were being increased beyond the limits that a human operator can handle. This research develops an efficient procedure to streamline the delivery of unit loads by the automated material handling system (AMHS). For this task, the research employs the event scheduling theory that has been successfully used in the both academia and industry. The developed procedure was applied to an actual LCD fabrication facility and improved the performance of an existing material handling system.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.48 no.5
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• pp.6-11
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• 2011

We have developed dissolved ozone decompose system in the used ozonated water for the semiconductor and LCD fabrication processes, which will be base of obtaining core process technology in the high performance, low price semiconductor and LCD fabrications. Using this technology, it is possible for the semiconductor wafer and LCD planer to process more rapid and chip, and productivity will be improved.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.34 no.3
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• pp.1-7
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• 2011

The stocker system is another name of automated storage and retrieval system (AS/RS) and being popularly used as main material handling tools in Liquid Crystal Display (LCD) and semiconductor fabrication facilities. Recently the use of the stocker system has been extended to transportation from conventional storage and retrieval in LCD fabrication facilities. Toolsets are connected in the ground level of the stocker system and 4~6 stories of the shelves are placed in the upper or lower ground level. As a consequence of the more sophisticated design, move requests imposed on the system greatly increased. For solving this problem, the industry adopted the dual-robot stocker system that two robots are moving along the same guide line in the stocker system. This research develops a closed-form solution to estimate a delivery rate of the dual robot stocker system under given design and operation parameters. Using this stochastic model, industry practitioners could analyze performance levels under given various design parameters, and ultimately the model helps optimizing the design parameters.

• Journal of the Semiconductor & Display Technology
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• v.19 no.3
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• pp.68-72
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• 2020

A new method for array testing of TFT-CD panel with the integrated gate driver circuits is presented. As larger size/high resolution TFT-LCD with the peripheral driver circuits has emerged, one of the important problems for manufacturing is array testing on the panel. This paper describes the technology of detecting defective arrays and optimizing the array testing process. For the effective characterization of pixel array, the pixel storage capability is simulated and measured with voltage imaging system. This technology permits full functional testing during the manufacturing process, enabling fabrication of large TFT-LCD panels with the integrated driver circuits.

• Journal of the Semiconductor & Display Technology
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• v.7 no.2
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• pp.29-33
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• 2008

LCD panels are increasingly used to show moving image material, for example in LCD television sets. However, moving images become blurred on LCD panels. One of the causes of motion blur is the slow reaction of LC(liquid crystal) cell to change in the pixel value. Another cause of motion blur is the hold-type characteristic of the LCD panel, during the frame time the image is shown continuously. This type of motion blur can be reduced with a scanning backlight. We have designed and fabricated a scanning backlight system that solves the hold-type characteristic problem in a way that Flat fluorescent lamp divided 6 blocks was scanned 60Hz.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.249-252
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• 2004

냉음극관(CCFL) 램프를 이용한 멀티램프 구동용 인버터를 제작 한 후 이를 이용하여 휘도 $20,000 cd/\textrm{m}^2$, 휘도 균일도 85%의 장비용 백라이트를 제작하였다. 이러한 고휘도, 높은 휘도 균일도의 직하방식 백라이트를 이용하여 기존의 형광등을 이용한 검사장비 보다 고휘도, 박형의 장수명 백라이트를 제작하였다.

• IE interfaces
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• v.17 no.spc
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• pp.131-140
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• 2004

The purpose of this paper is to develop and show the efficiency of the URL(Unload Request Logic) and LRL(Load Request Logic) of the dispatcher in the Fab(Fabrication) Manufacturing Execution System. These logics are the core procedures which control the material(wafer and glass substrate) flow efficiently in the semiconductor and LCD fab considering inter-bay as well as intra-bay material flow. We use the present and future status information of the system by look-ahead and the information about the future transportation schedule of Automated Guided Vehicles. The simulation results show that the URL and LRL presented in this paper reduce the average lead time, average and maximum WIP level, and the average available AGV waiting time.

• Korean Management Science Review
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• v.32 no.4
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• pp.69-80
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• 2015

The semiconductor industry is one of those in which the most intricate processes are involved and there are many critical factors that are controlled with precision in those processes. Naturally production scheduling in the semiconductor industry is also very complex and studied by the industry and academia for many years; however, still there are many issues left unclear in the problem. This paper proposes an multi-objective optimization-based scheduling method for semiconductor fabrication(fab). Two main objectives are throughput maximization and meeting target production quantities. The first objective aims to reduce production cost, especially the fixed cost incurred by a large investment constructing a new fab facility. The other is meeting customer orders on time and also helps a fab maintain stable throughput through controlled WIP balancing in the long run. The paper shows a trade-off structure between the two objectives through experimental studies, which provides industrial practitioners with useful references.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.11
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• pp.1143-1148
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• 2004

In this study, photoresist stripping in semiconductor or LCD (liquid crystal display) fabrication processes using DIO, was investigated. In order to obtain the high PR stripping efficiency of DIO. we have developed new ozone-generating system with high ozone concentration and ozone-resolving system with high contact ratio. In this study, we obtained ozone gas concentrations of 11 % by new ozone-generating system, ozone-resolving efficiency of 99.5 % and maximum solubility of 130 ppm in deionized water. We applied the newly designed equipments to photoresist stripping processes and obtained similar results to SPM(sulfuric-peroxide mixture) process characteristics.

• ETRI Journal
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• v.35 no.4
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• pp.571-577
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• 2013

The fabrication of a thin-film transistor backplane and a liquid-crystal display using printing processes can eliminate the need for photolithography and offers the potential to reduce the manufacturing costs. In this study, we prepare contact via structures through a poly(methyl methacrylate) polymer insulator layer using inkjet printing. When droplets of silver ink composed of a polymer solvent are placed onto the polymer insulator and annealed at high temperatures, the silver ink penetrates the interior of the polymer and generates conducting paths between the top and bottom metal lines through the partial dissolution and swelling of the polymer. The electrical property of various contact via-hole interconnections is investigated using a semiconductor characterization system.