반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

광학스캐닝 메커니즘 및 근적외선 카메라 광학계를 이용한 태양전지 웨이퍼 검사장치 개발

Development of Inspection System With Optical Scanning Mechanism and Near-Infrared Camera Optics for Solar Cell Wafer

  • 김경범 (한국교통대학교 공과대학 항공기계설계학과)
  • Kim, Gyung Bum (Aeronautical & Mechanical Design Eng., Korea National Univ. of Transportation)
  • 투고 : 2012.07.05
  • 심사 : 2012.09.17
  • 발행 : 2012.09.30
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초록

In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.

키워드

참고문헌

  1. K. J., "2010 New & Renewable Energy", KEMCO, 2010.
  2. Yeon, J. S. and Kim, G. B., "Investigation of Laser Scattering Pattern and Defect Detection Based on Rayleigh Criterion for Crystalline Silicon Wafer Used in Solar Cell", KSPE, Vol. 28, pp. 606-613, 2011.
  3. Li, W. C. and Tsai, D. M., "Automatic Saw-mark Detection in Multi-crystalline Solar Wafer Images," Solar Energy Materials & Solar cells, DOI:10.1016/j.solmat.2011.03.025, 2011
  4. Byelyayev, A., "Stress Diagnostics and Crack Detection in Full-Size Silicon Wafers using Resonance Ultrasonic Vibrations," Department of Electrical Engineering, Ph. D. University of South Florida, 2005.
  5. Kim, G. B., Shin, Y. S. and Moon S. H., "A Laser- Applied Hybrid Focus Method for the Measurement of Surface Morphology with Depth Discontinuity," KSPE, Vol. 23, No. 9, pp. 111-118, 2006.
  6. Sunil Kumar Kopparapu, "Lighting Design for Machine Vision Application," Image & Vision Computing, Vol. 24, pp. 720-726, 2006. https://doi.org/10.1016/j.imavis.2005.12.016
  7. An, B. I. and Kim, G. B., "A Study on Selection of Parameters in Structured Illumination Mechanism for silicon Wafer in Solar Cell," Proceedings of the KSME 2011 Spring Annual Meeting, pp. 336-337, 2011.
  8. An, B. I., Kim, G. B. and Jung, J. L.,"A Study on Optimum Illumination Condition of Hybrid Illumination Mechanism for Solar Cell Wafer," Spring Conference of KSDT, pp. 187-189, 2011.
  9. Choi, M. Y., Kang, K. S., Park, J. H., Kim, W. Ta. And Kim, K. S., "Measurement of Defects and Stress by Infrared Thermography," KSPE, Vol. 23, No. 10, pp. 30-35, 2006.
  10. An, B. I. and Kim, G. B., "Development of Inspection System for Solar Cell Wafer based on Optical Scanning Mechanism," Proceedings of the KSPE 2011.