반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

원추형 금속 기판의 팁 각도에 따른 탄소 나노튜브 이미터의 전계방출 특성

Field-emission characteristics of carbon nanotube emitters in terms of tip angles of conical-type metal substrates

  • 김종필 (한양대학교 전자전기제어계측공학과) ;
  • 노영록 (한양대학교 전자전기제어계측공학과) ;
  • 장한빛 (한양대학교 전자전기제어계측공학과) ;
  • 박진석 (한양대학교 전자전기제어계측공학과)
  • Kim, Jong-Pil (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Noh, Young-Rok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Chang, Han-Beet (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
  • 투고 : 2011.05.13
  • 심사 : 2011.06.15
  • 발행 : 2011.06.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A tip-type carbon nanotube(CNT)-based field emitter was studied to consider it as electron source for micro-focused x-ray tube. The CNT was grown directly on a metal (tungsten) substrate by using an inductively coupled plasma-chemical vapor deposition (ICP-CVD) method. Prior to CNT growth, the metal substrate was etched to have various tip angles from $10^{\circ}$ to $180^{\circ}C$ (flat-type). The morphologies and microstructures of all the grown CNTs were analyzed via field-emission SEM. Furthermore, the effects of substrate tip-angles on the emission properties of CNT-based field emitters were characterized to estimate the maximum current density, the turn-on voltage, and the spatial distribution of electron beams. Prolonged long-term stability testing of the CNT emitters was also performed. All the experiment results obtained from this study indicated why a tip-type CNT emitter, compared with a flat-type CNT emitter, would be more desirable for a micro-focused x-ray system, in terms of the emission current level, the focused beam area, and the emission stability.

키워드

참고문헌

  1. H. Y. Jung, S. M. Jung, and J. S. Suh, "Horizontally aligned single-walled carbon nanotube field emitters fabricated on vertically aligned multi-walled carbon nanotube electrode arrays", Carbon, Vol. 46, pp. 1345-1349, 2008. https://doi.org/10.1016/j.carbon.2008.05.020
  2. E. Terrado, M. Redrado, E. Munoz, W. K. Maser, A. M. Benito, and M. T. Martinez, "Aligned carbon nanotubes grown on alumina and quartz substrates by a simple thermal CVD process", Diamond Relat. Mater., Vol. 15, pp. 1059-2815, 2006. https://doi.org/10.1016/j.diamond.2005.10.071
  3. Z. Liu, J. Zhang, G. Yang, Y. Cheng, O. Zhou, and J. Lu, "Development of a carbon nanotube based micro-focus x-ray tube with single focusing electrode", Rev. Sci. Instrum., Vol. 77, pp. 054302-1-6, 2006. https://doi.org/10.1063/1.2198793
  4. S. H. Heo, A. Ihsan, and S. O. Cho, "Transmissiontype microfocus x-ray tube using carbon nanotube field emitters", Appl. Phys. Lett., Vol. 90, pp. 183109-1-3, 2007. https://doi.org/10.1063/1.2735549
  5. J. P. Kim, Y. K. Kim, C. K. Park, H. Y. Choi, C. H. Shon, J. U. Kim, and J. S. Park, "Long-term stability of various carbon-nanotube-based micro-tip emitters", Diamond Relat. Mater., Vol. 18, pp. 486-489, 2009. https://doi.org/10.1016/j.diamond.2008.10.019
  6. Y. Qin and M. Hu, "Field emission properties of electrophoretic deposition carbon nanotubes film", Appl. Surf. Sci., Vol. 255, pp. 7618-7622, 2009. https://doi.org/10.1016/j.apsusc.2009.04.038
  7. Y. I. Song, G. Y. Kim, H. K. Choi, H. J. Jeong, K. K. Kim, C. M. Yang, S. C. Lim, K. H. An, K. T. Jung, and Y. H. Lee, "Fabrication of carbon nanotube field emitters using a dip-coating method", Chem. Vap. Deposition, Vol. 12, pp. 375-379, 2006. https://doi.org/10.1002/cvde.200506442
  8. B. R. Huang, C. S. Huang, C. F. Hsieh, and Y. F. Liu, "The electrical conduction mechanism of multiwalled carbon nanotubes film synthesized by microwave plasma chemical vapor deposition", Diamond Relat. Mater., Vol. 13, pp. 2131-2135, 2004. https://doi.org/10.1016/j.diamond.2004.07.005