Journal of the Korea Academia-Industrial cooperation Society (한국산학기술학회논문지)

The Korea Academia-Industrial cooperation Society (한국산학기술학회)
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Analysis of the Electrical Defect Detection Mechanism using a Low Energy Electron Beam on the TFT Substrate for TFT-LCDs

TFT-LCD용 TFT기판에서 저에너지 전자빔을 이용한 전기적 결함 검출 메카니즘 분석

  • Oh, Tae-Sik (Department of Information Display, Sun Moon University) ;
  • Kim, Ho-Seob (Department of Information Display, Sun Moon University) ;
  • Kim, Dae-Wook (Department of Information Display, Sun Moon University) ;
  • Ahn, Seung-Joon (Department of Information Display, Sun Moon University) ;
  • Lee, Gun-Hee (Inspection Engineering Office, LG Display Co., Ltd.)
  • 오태식 (선문대학교 공과대학 정보디스플레이학과) ;
  • 김호섭 (선문대학교 공과대학 정보디스플레이학과) ;
  • 김대욱 (선문대학교 공과대학 정보디스플레이학과) ;
  • 안승준 (선문대학교 공과대학 정보디스플레이학과) ;
  • 이건희 (LG디스플레이주식회사 생산기술센터 검사기술연구실)
  • Received : 2011.02.19
  • Accepted : 2011.04.07
  • Published : 2011.04.30
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Abstract

We have analyzed the electrical defect detection mechanism using low energy microcolumn on the TFT substrate for TFT-LCD. In this study, we have acquired the SEM images of the various pixel defects for 7-inch TFT substrate by scanning of low energy electron beam in the high vacuum chamber. Futhermore, we have interpreted the defect detection mechanism through the correlations between the SEM images and electrical behaviors of the defective pixels. As a result, we obtained consistent results as the follows. We can confirm that the SEM images using low energy electron beam are significantly affected by the space charge effect.

TFT-LCD용 TFT기판 상에서 저에너지 마이크로 컬럼을 이용하는 전기적인 결함 검출 메카니즘을 분석하였다. 본 연구에서는 고진공 챔버 내에서 7인치 TFT 기판에 저에너지 전자빔을 주사하여 여러 가지 불량 화소에 대한 SEM 이미지를 획득하였다. 더불어 각각의 불량 화소에서 나타나는 현상과 전기적인 거동과의 연관성을 분석하여 검출 메카니즘을 해석하였다. 그 결과로서 저에너지 초소형 전자 컬럼을 이용하는 저에너지 전자빔에 의한 SEM 이미지는 전자간 반발효과에 크게 영향을 받는 일관성 있는 결과를 확인하였다.

Keywords

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