DOI QR코드

DOI QR Code

Microwave Plasma Process에 의한 N-Hexane으로부터 다이아몬드 박막제작 및 특성

Fabrication and Properties of Diamond Thin-Film from N-Hexane by Using Microwave Plasma Process

  • 한상보 (경남대학교 전기공학과) ;
  • 권태진 (경남대학교 전기공학과) ;
  • 박상현 (경남대학교 전기공학과) ;
  • 박재윤 (경남대학교 전기공학과) ;
  • 이승지 (경남대학교 대학원 첨단공학과)
  • 투고 : 2010.12.05
  • 심사 : 2011.01.25
  • 발행 : 2011.04.30

초록

In this paper, the best conditions for the deposition of the high quality diamond thin-film from N-hexane as a carbon source in the microwave plasma process was carried out. Major parameters are the deposition time, flow rates of oxygen and hexane. The deposition time for the steady state thin-film was required more than 4[h], and the suitable flow rates of hexane and oxygen for the high-quality thin-film are 0.4[sccm] and 0.1~0.2[sccm], respectively. In addition, amorphous carbons such as DLC and graphite were grown by increasing the flow rate of hexane, and it decreased by increasing the flow rate of oxygen. Specifically, the growth rate is about 1.5[${\mu}mh-1$] under no addition of oxygen and it decreased about 60[%] as ca. 1.0[${\mu}mh-1$] with oxygen.

키워드

참고문헌

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