Fabrication and Properties of Diamond Thin-Film from N-Hexane by Using Microwave Plasma Process
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Han, Sang-Bo
(경남대학교 전기공학과)
Kwon, Tae-Jin (경남대학교 전기공학과) Park, Sang-Hyun (경남대학교 전기공학과) Park, Jae-Youn (경남대학교 전기공학과) Lee, Seung-Ji (경남대학교 대학원 첨단공학과) |
1 | B. V. Spitsyn, L. L. Bouilov, and B. V. Derjaguin, “Vapor growth of diamond on diamond and other surface,” J. Crystal Growth., vol. 52, 219-226, 1981. DOI |
2 | S. Matsumoto, Y. Sato, M. Kamo, and N. Setaka, “Vapor Deposition of diamond Particle from Methane”, Jpn. J. Appl. Phys., Vol. 21, No. 4, L183-185, 1982. DOI |
3 | Xiao Jun Hu, Yao Gen Shen, Xiao Peng Hao, Bao Yi Wang, “The structure properties of B-O codoped diamond films”, Vol. 18, No. 2-3, 210-212, 2009. DOI |
4 | Jin-hai Gao, Lan Zhang, Bing-lin Zhang, Ning Yao, Ai-Hua Wang, “Fabrication of globe-like diamond microcrystalline aggregate films and investigation of their field emission properties,” Thin Solid Films, Vol. 516, No. 21, 7807-7811, 2008. DOI |
5 | D. Saito, H.Isshiki, T. Kimira, “Positive-bias enhanced growth of high quality diamond films by microwave plasma chemical vapor deposition,” Diamond & Related Materials, Vol. 18, 56-60, 2009. DOI |
6 | X. M. Meng, W.Z.Tang, others, “Application of CVD nanocrystalline diamond films to cemented carbide drills,” Int. J. Refractory Metals & Hard Materials, Vol. 26, 485-490, 2008. DOI |
7 | Y. S. Li, Y. Tang, Q. Yang, S. Shimada, K. Y. Lee, A. Hirose, “Al-enhanced nucleation and adhesion of diamond films on WC-Co substrates,” Int. J. Refractory Metals & Hard Materials, Vol. 26, 465-471, 2008. DOI |
8 | D. Saito, E. Tsutsumi, N. Ishigaki, T. Tashiro, T. Kimura, S. Yugo, “A new method of formation of impurity-doped diamond films by bias method,” Diamond & Related Materials, Vol. 11, 1804, 2002. DOI |
9 | Yasuo Koide, “Metal-diamond semiconductor interface and photodiode application,” Applied Surface Sci., Vol. 254, No. 19, 6268-6272, 2008. DOI |
10 | Duosheng Li, Dunwen Zuo, Wenzhung Lu, Rongfa Chen, Bingkun Xiang, Min Wang, “Effects of methane concentration on diamond spherical shell films prepared by DC-plasma jet CVD,” Solid State Ionics, Vol. 179, No. 21-26, 1263-1267, 2008. DOI |
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