Journal of the Korean Institute of Illuminating and Electrical Installation Engineers (조명전기설비학회논문지)

The Korean Institute of IIIuminating and Electrical Installation Engineers (한국조명전기설비학회)
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Decomposition Characteristics of Perfluorocompounds(PFCs) Gas through Gliding Arc Plasma with Hydrogen Gas

수소 가스를 첨가한 글라이딩 아크 플라즈마의 과불화화합물(PFCs) 가스 분해 특성

  • 송창호 (인하대학교 대학원 전기공학과) ;
  • 박동화 (인하대학교 열플라즈마환경기술연구센터) ;
  • 신백균 (인하대학교 IT공과대학 전기공학부)
  • Received : 2010.12.02
  • Accepted : 2011.01.21
  • Published : 2011.04.30
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Abstract

Perfluorocompounds (PFCs) gases were decomposed by gliding arc plasma generated by AC pulse power. $N_2$ gas of 10 LPM flow rate and $H_2$ gas of 0.5 LPM were introduced into the gliding arc plasma generated between a pair of electrodes with SUS 303 material, and the PFCs gases were injected in the plasma and thereby were decomposed. The PFCs gas-decomposition-characteristics through the gliding arc plasma were analyzed by FT-IR, where pure $N_2$ and $H_2$-added $N_2$ environment were used to generate the gliding arc plasma. The PFCs gas-decomposition-properties were changed by electric power for gliding arc plasma generation and the H2 gas addition was effective to enhance the PFCs decomposition rate.

Keywords

References

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