Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Fabrication process and device characterization of distributed feedback InGaAsP/InP laser diodes for optical fiber communication module

광통신 모듈용 분포 귀환형 InGaAsP/InP 레이저 다이오드 제작 및 소자 특성평가

  • Jeon, Kyung-Nam (Division of New Business, KEC Corporation) ;
  • Kim, Keun-Joo (Department of Mechanical Engineering, Chonbuk National University)
  • Received : 2011.11.28
  • Accepted : 2011.12.15
  • Published : 2011.12.31
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Abstract

We fabricated distributed feedback InGaAsP/InP laser diodes for optical fiber communication module and characterized the lasing properties in continuous wave operation. The active layer of 7-period InGaAsP(1.127 eV)/InGaAsP(0.954 eV) multi-quantum well structure was grown by the metal-organic chemical vapor deposition. The grating for waveguide was also fabricated by the implementation of the Mach-Zehender holographic method of two laser beams interference of He- Cd laser and the fabricated laser diode has the dimension of the laser length of $400{\mu}m$ and the ridge width of $1.2{\mu}m$. The laser diode shows the threshold current of 3.59 mA, the threshold voltage of 1.059 V. For the room-temperature operation with the current of 13.54 mA and the voltage of 1.12 V, the peak wavelength is about 1309.70 nm and optical power is 13.254 mW.

Keywords

References

  1. H. Ghafouri-Shiraz and B. S. K. Lo, "Distributed Feedback Laser Diodes-Principles and Physical Modelling," (John Wiley & Sons, New York, 1996), pp. 8-32.
  2. H. Kogelnik and C. V. Shank, "Stimulated Emission in a Periodic Structure," Appl. Phys. Lett. Vol. 18, No. 4 pp. 152-154, 1971. https://doi.org/10.1063/1.1653605
  3. H. Kogelnik and C. V. Shank, "Coupled-Wave Theory of Distributed Feedback Lasers," J. Appl. Phys. Vol. 43, No. 5, pp. 2327-2336, (1972). https://doi.org/10.1063/1.1661499
  4. M. Schell, D. Huhse, W. Utz, J. Kaessner, D. Bimberg, and I. S. Tarasov, "Jitter and Dynamics of Selfseeded Fabry-Perot laser diodes," IEEE J. Selet. Topics in Quantum Electron. Vol. 1, No. 2, pp. 528-534, 1995. https://doi.org/10.1109/2944.401238
  5. H. Kim, "Pulsed-incoherent-light-injected Fabry-Perot Laser Diode for WDM Passive Optical Networks," Opt. Express, Vol. 18, No. 2, pp. 1714-1721, 2010. https://doi.org/10.1364/OE.18.001714
  6. A. J. Steckl, P. Chen, X. Cao, H. E. Jackson, M. Kumar, and J. T. Boyd, "GaAs Quantum Well Distributed Bragg Reflection Laser with AlGaAs/GaAs Superlattice Gratings Fabricated by Focused Ion Beam Mixing," Appl. Phys. Lett. Vol. 67 No. 2, pp. 179-181, 1995. https://doi.org/10.1063/1.114659
  7. L. Goldberg, H. F. Taylor, J. F. Weller, and D. M. Bloom, "Microwave Signal Generation with Injection- Locked Laser Diodes," Electron. Lett. Vol. 19, No. 13, pp. 491-493, 1983. https://doi.org/10.1049/el:19830333
  8. R. J. Lang and A. Yariv, "Coupling Coefficients for Coupled-Cavity Lasers," IEEE J. Quantum Electron. Vol. QE-23, No. 3, p. 287, 1987.
  9. M. Razeghi, M. Defour, R. Blondeau, F. Omnes, P. Maurel, O. Acher, F. Briliouet, J. C. C-Fan, and J. Salerno, "First CW Operation of a $Ga_{0.25}In_{0.75}As_{0.5}P_{0.5}$-InP Laser on a Silicon Substrate," Appl. Phys. Lett. Vol. 53, No. 24, pp. 2389-2390, 1988. https://doi.org/10.1063/1.100239
  10. H. Wada and T. Kamijoh, "Room-temperature CW Operation of InGaAsP Lasers on Si Fabricated by Wafer Bonding," IEEE J. Quantum Electron. Vol. 8, No. 2, pp. 173-175, 1996.
  11. T. Okamoto, N. Nunoya, Y. Onodera, S. Tamura, and S. Arai, "Continuous Wave Operation of Optically Pumped Membrane DFB laser," Electron. Lett. Vol. 37, pp. 1455-1457, 2001. https://doi.org/10.1049/el:20010983
  12. T. Okamoto N. Nunoya, Y. Onodera, T. Yamazaki, S. Tamura, and S. Arai, "Optically Pumped Membrane BH-DFB Lasers for Low-threshold and Single-mode Operation," IEEE J. Select. Topics in Quantum Electron. Vol. 9, No. 5, pp. 1361-1366, 2003. https://doi.org/10.1109/JSTQE.2003.819495
  13. T. Okamoto T. Yamazaki, S. Sakamoto, S. Tamura, and S. Arai, "Low-threshold Membrane BH-DFB Laser Arrays with Precisely Controlled Wavelength over a wide range," IEEE Photon. Technol. Lett. Vol. 16, No. 5, pp. 1242-1244, 2004. https://doi.org/10.1109/LPT.2004.825997
  14. S. Sakamoto, T. Okamoto, T. Yamazaki, S. Tamura, and S. Arai, "Multiple-wavelength Membrane BHDFB Laser Arrays," IEEE J. Select. Topics in Quantum Electron. Vol. 11, pp. 1174-1179, 2005. https://doi.org/10.1109/JSTQE.2005.853839
  15. T. Maruyama, T. Okumura, S. Sakamoto, K. Miura, Y. Nishimoto, and S. Arai, "Direct Bonding of GaIn-AsP/InP Membrane Structure on SOI wafer," Presented at the 18th Indium Phosphide and Related Materials Conference, Princeton, USA, 7-11, May 2006.
  16. H. Park, A. W. Fang, S. Kodama, and J. E. Bowers, "Hybrid Silicon Evanescent Laser Fabricated with a Silicon Waveguide and III-V Offset Quantum Wells," Opt. Express Vol. 13, No. 23, pp. 9460-9464, 2005. https://doi.org/10.1364/OPEX.13.009460
  17. Q. Zhao, J. Q. Pan, F. Zhou, B. J. Wang, L. F. Wang, and W. Wang, "Monolithic Integration of an InGaAsPInP Strained DFB Laser and an Electroabsorption Modulator by Ultra-low-pressure Selective-areagrowth MOCVD", Semicon. Sci. Technol. Vol. 20, No. 6, pp. 544-547, 2005. https://doi.org/10.1088/0268-1242/20/6/011