한국소음진동공학회논문집 (Transactions of the Korean Society for Noise and Vibration Engineering)

  • 제21권3호
  • /
  • Pages.206-211
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  • 2011
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  • 1598-2785(pISSN)
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  • 2287-5476(eISSN)
한국소음진동공학회 (The Korean Society for Noise and Vibration Engineering)
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표면 탄성파 장치에 기반한 무선 간극 센서

Wireless Gap Sensor Based on Surface Acoustic Wave Device

  • 투고 : 2010.07.23
  • 심사 : 2011.01.27
  • 발행 : 2011.03.20
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초록

In this paper, we report a high-precision wireless gap sensor based on a surface acoustic wave (SAW) device. The sensing element is a parallel-plate capacitor whose dimensions are $3{\times}3\;mm^2$, and is attached to the SAW device as an external load. The SAW device, equipped with an RF antenna, serves simultaneously as a signal conditioner and an RF transponder. The center frequency of the SAW device is 450 MHz. The wireless gap sensor prototype exhibits a resolution of 100 nm and a sensing range of $50{\mu}m$. The proposed sensor system can be used for remote, high-precision gap measurement in hard-to-reach environments.

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참고문헌

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