Transactions of The Korea Fluid Power Systems Society (유공압시스템학회논문집)

The Korean Society for Fluid Power and Construction Equipment (유공압건설기계학회)
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A Dual Vacuum Wafer Prealigner and a Multiple Level Structure

2단 진공 웨이퍼 정렬장치 및 다층 구조 설계

  • 김형태 (한국생산기술연구원 스마트시스템연구부) ;
  • 최문수 ((주)나인벨)
  • Received : 2011.07.06
  • Accepted : 2011.07.26
  • Published : 2011.09.01
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Abstract

This study aims at aligning multiple wafers to reduce wafer handling time in wafer processes. We designed a multilevel structure for a prealigner which can handle multiple wafer simultaneously in a system. The system consists of gripping parts, kinematic parts, vacuum chucks, pneumatic units, hall sensors and a DSP controller. Aligning procedure has two steps: mechanical gripping and notch finding. In the first step, a wafer is aligned in XY directions using 4-point mechanical contact. The rotational error can be found by detecting a signal in a notch using hall sensors. A dual prealigner was designed for 300mm wafers and constructed for a performance test. The accuracy was monitored by checking the movement of a notch in a machine vision. The result shows that the dual prealigner has enough performance as commercial products.

Keywords

References

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