한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제48권1호
  • /
  • Pages.69-73
  • /
  • 2011
  • /
  • 1229-7801(pISSN)
  • /
  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
권호 표지
DOI QR코드

DOI QR Code

N2O 반응 가스를 주입한 RF Reactive Magnetron Sputtering에 의한 ZrO2 박막의 구조 및 부식특성 연구

Structural and Corrosive Properties of ZrO2 Thin Films using N2O as a Reactive Gas by RF Reactive Magnetron Sputtering

  • 투고 : 2010.11.25
  • 심사 : 2010.12.14
  • 발행 : 2011.01.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A $ZrO_2$ thin film as a corrosion protective layer was deposited on Zircaloy-4 (Z-4) clad material using $N_2O$ as a reactive gas by RF reactive magnetron sputtering at room temperature. The Z-4 substrate was located in plasma or out of plasma during the $ZrO_2$ deposition process to investigate mechanical and corrosive properties for the plasma immersion. Tetragonal and monoclinic phases were existed in $ZrO_2$ thin film immersed in plasma. We observed that a grain size of the $ZrO_2$ thin film immersed in plasma state is larger than that of the $ZrO_2$ thin film out of plasma state. In addition, the corrosive property of the $ZrO_2$ thin films in the plasma was characterized using the weight gains of Z-4 after the corrosion test. Compared with the $ZrO_2$ thin film immersed out of plasma, the weight gains of $ZrO_2$ thin film immersed in plasma were larger. These results indicate that the $ZrO_2$ film with the tetragonal phase in the $ZrO_2$ can protect the Z-4 from corrosive phenomena.

키워드

참고문헌

  1. S.-H. Chae, Y.-W. Kim, I.-H. Song, H.-D. Kim, and J. S. Bae, "Effects of Template Size and Content on Porosity and Strength of Macroporous Zirconia Ceramics(in Korean)," J. Kor. Ceram. Soc., 46 [1] 35-40 (2009). https://doi.org/10.4191/KCERS.2009.46.1.035
  2. K.-H. Lee, J.-P. Ahn, J.-S. Park, Y.-S. Lee, and B.-H. Lee, "Preparation and Characterization of Black Color Zirconia by Impregnation Method Used by Graphite(in Korean)," J. Kor. Ceram. Soc., 46 [4] 379-84 (2009). https://doi.org/10.4191/KCERS.2009.46.4.379
  3. M. I. Maleto, L. I. Solovjeva, E. P. Turevskaya, K. A. Vorotilov, and M. I. Yanovskaya, "Alkoxy-Derived $Y_2O_3$-stabilized $ZrO_2$ Thin-Films," Thin Solid Films, 249 [1] 1-5 (1994). https://doi.org/10.1016/0040-6090(94)90076-0
  4. J. S. Kim, H. A. Marzouk, and P. J. Reucroft, "Deposition and Structural Characterization of $ZrO_2$ and Yttria-Stabilized $ZrO_2$ Films by Chemical-Vapor-Deposition," Thin Solid Films, 254 [1] 33-8 (1995). https://doi.org/10.1016/0040-6090(94)06274-O
  5. D. D. Hass, P. A. Parrish, and H. N. G. Wadley, "Electron Beam Directed Vapor Deposition of Thermal Barrier Coatings," J. Vac. Sci. Technol. A, 16 [6] 3396-401 (1998). https://doi.org/10.1116/1.581492
  6. N. Sonnenberg, A. S. Longo, M. J. Cima, B. P. Chang, K. G. Ressler, P. C. McIntyre, and Y. P. Liu, "Preparation of Biaxially Aligned Cubic Zirconia Films on Pyrex Glass Substrates Using Ion-beam Assisted Deposition," J. Appl. Phys., 74 [2] 1027-34 (1993). https://doi.org/10.1063/1.354949
  7. J. H. Lee, J.H Koo, H. S. Shim, and H. T. Jeon, "Characteristic of $ZrO_2$ Films Deposited by Using the Atomic Layer Deposition Method," J. Kor. Phys. Soc., 44 915-19 (2004).
  8. Nobuya Iwamoto, Yukio Makino, and Masayoshi Kamai, "Characterization of Rf-sputtered Zirconia Coatings," Thin Solid Films, 153 233-42 (1987). https://doi.org/10.1016/0040-6090(87)90185-4
  9. S. Ben Amor, B. Rogier, G. Baud, M. Jacquet, and M. Nardin, "Characterization of Zirconia Films Deposited by r.f. Magnetron Sputtering," Mater. Sci. Eng. B, 57 [1] 28-39 (1998). https://doi.org/10.1016/S0921-5107(98)00205-0
  10. Kuo D.H. and Chien C.H., "Growth and Properties of Sputtered Zirconia and Zirconia-silica Thin Films," Thin Solid Films, 429 [1] 40-5 (2003). https://doi.org/10.1016/S0040-6090(03)00143-3
  11. S. H. Kim, K. H. Lee, J. H. Ko, and Y. S. Yoon, "Structural and Corrosive Properties of $ZrO_2$ Thin Films on Zircaloy-4 by RF Reactive Magnetron Sputtering," J. Kor. Phys. Soc., 49 [3] 1207-10 (2006).
  12. J. H. Baek, Y. H. Jeong, and I. S. Kim, "Effects of the Accumulated Annealing Parameter on the Corrosion Characteristics of a Zr-0.5Nb-1.0Sn-0.5Fe-0.25Cr Alloy," J. Nucl. Mat., 280 235-45 (2000). https://doi.org/10.1016/S0022-3115(99)00288-3
  13. J. B. Kang, "Mechanical Properties Observation of Ce-TZP Ceramics by Quantity Change of $CeO_2$(in Korean)," J. Kor. Ceram. Soc., 47 [5] 439-44 (2010). https://doi.org/10.4191/KCERS.2010.47.5.439
  14. S. H. Choi, J. S. Kim, and Y. S. Yoon, "Effect of Plasma Immersion on Crystallinity of $V_2O_5$ Film Grown by dc Reactive Sputtering at Room Temperature," Thin Solid Films, 493 [1] 1-5 (2005). https://doi.org/10.1016/j.tsf.2004.07.057

피인용 문헌

  1. Properties of colored topaz by new surface treatment vol.23, pp.2, 2013, https://doi.org/10.6111/JKCGCT.2013.23.2.81