Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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MEMS Accelerometer Modeling and Performance Analysis by Considering Signal Distortion

신호왜곡 현상을 고려한 MEMS 가속도 센서 모델링 및 성능특성 분석

  • 김용일 (한양대학교 대학원 기계공학과) ;
  • 유홍희 (한양대학교 기계공학부)
  • Received : 2010.08.30
  • Accepted : 2011.01.18
  • Published : 2011.02.20
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Abstract

In this paper, assumed mode method on Euler beam theory is employed and signal distortion is considered to obtain the performances of a MEMS accelerometer which are a sensitivity and measurable frequency range(MFR). Not only the sensitivities and MFR but also the variations of dynamic responses and natural frequencies of the MEMS accelerometer are investigated for several sets of beam properties such as length, width, thickness and Young's modulus. It is stated that the variations of beam properties significantly influence the performances of the MEMS accelerometer and the relationship between sensitivities and MFR is inversely proportional to each other.

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References

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