대한기계학회논문집B (Transactions of the Korean Society of Mechanical Engineers B)

  • 제35권1호
  • /
  • Pages.17-22
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  • 2011
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  • 1226-4881(pISSN)
  • /
  • 2288-5324(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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ZnO 기반 박막트랜지스터의 기계적 안정성 확보에 관한 연구

Study on Design of ZnO-Based Thin-Film Transistors With Optimal Mechanical Stability

  • 이덕규 (성균관대학교 기계공학부) ;
  • 박경애 (성균관대학교 신소재공학부) ;
  • 안종현 (성균관대학교 신소재공학부) ;
  • 이내응 (성균관대학교 신소재공학부) ;
  • 김윤제 (성균관대학교 기계공학부)
  • Lee, Deok-Kyu (School of Mechanical Engineering, Sungkyunkwan Univ.) ;
  • Park, Kyung-Yea (School of Advanced Materials Science & Engineering, Sungkyunkwan Univ.) ;
  • Ahn, Jong-Hyun (School of Advanced Materials Science & Engineering, Sungkyunkwan Univ.) ;
  • Lee, Nae-Eung (School of Advanced Materials Science & Engineering, Sungkyunkwan Univ.) ;
  • Kim, Youn-Jea (School of Mechanical Engineering, Sungkyunkwan Univ.)
  • 투고 : 2010.05.26
  • 심사 : 2010.10.25
  • 발행 : 2011.01.01
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초록

실험을 통해 구현한 ZnO 기반의 투명 박막트랜지스터의 기계적 특성을 분석하고 안정성에 대한 확보방안을 제시하기 위해 FEM (Finite Element Method)을 이용하여 소자를 구성하는 브릿지 와 패드 부분에 대한 구조해석을 실시하였다. 소자의 유연성 확보를 위해 설계된 브릿지 부분의 웨이브 패턴을 구현한 결과 실험 값 대비 최대 진폭의 크기가 오차 0.5%로 실험값과 유사한 신뢰성 있는 결과 값을 얻어낼 수 있었다. 이러한 결과를 바탕으로 브릿지와 패드 사이에 나타나는 압축 응력을 확인하였으며, 압축 응력 값을 패드에 적용하여 그 변형 정도를 분석하였다. 기계적으로 안정성을 갖는 소자를 설계하기 위해 $SiO_2$ 절연층위의 ITO 전극과 ZnO 활성 층의 위치 및 크기를 예측 하였으며, SU-8 코팅 두께를 조절함으로써 중성 역학 층 (Neutral Mechanical Plane)의 위치와 구조적 타당성에 대하여 분석하였다.

ZnO-based thin-film transistors (TFTs) have been fabricated and the mechanical characteristics of electric circuits, such as stress, strain, and deformation are analyzed by the finite element method (FEM). In this study, a mechanical-stability design guide for such systems is proposed; this design takes into account the stress and deformation of the bridge to estimate the stress distribution in an $SiO_2$ film with 0 to 5% stretched on 0.5-${\mu}m$-thick. The predicted buckle amplitude of $SiO_2$ bridges agrees well with experimental results within 0.5% error. The stress and strain at the contact point between bridges and a pad were measured in a previous structural analysis. These structural analysis suggest that the numerical measurement of deformation, SU-8 coating thickness for Neutral Mechanical Plane (NMP) and ITO electrode size on a dielectric layer was useful in enhancing the structural and electrical stabilities.

키워드

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