Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Preparation and Characterization of Low k Thin Film using a Preceramic Polymer

Preceramic Polymer를 이용한 저유전박막 제조 및 특성 분석

  • Kim, Jung-Ju (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Jung-Hyun (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Yoon-Joo (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kwon, Woo-Teck (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Soo-Ryong (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Choi, Doo-Jin (Department of Materials Science and Engineering, Yonsei University) ;
  • Kim, Hyung-Sun (School of Materials Science and Engineering, Inha University) ;
  • Kim, Young-Hee (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology)
  • 김정주 (한국세라믹기술원 에너지소재센터) ;
  • 이정현 (한국세라믹기술원 에너지소재센터) ;
  • 이윤주 (한국세라믹기술원 에너지소재센터) ;
  • 권우택 (한국세라믹기술원 에너지소재센터) ;
  • 김수룡 (한국세라믹기술원 에너지소재센터) ;
  • 최두진 (연세대학교 신소재공학부) ;
  • 김형순 (인하대학교 신소재공학부) ;
  • 김영희 (한국세라믹기술원 에너지소재센터)
  • Received : 2011.10.07
  • Accepted : 2011.11.30
  • Published : 2011.11.30
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Abstract

Recently, variety of organic and inorganic hybrid materials have recently investigated as alternative routes to SiOC, $SiO_2$ thin film formation at low temperatures for applications in electronic ceramics. Specially, silicon based polymers, such as polycarbosilane, polysilane and polysilazane derivatives have been studied for use in electronic ceramics and have been applied as dielectric or insulating materials. In this study, Polycarbosilane(PCS), which Si-$CH_2$-Si bonds build up the backbone of the polymer, has been investigated as low-k materials using a solution process. After heat treatment at 350$^{\circ}C$ under $N_2$ atmosphere, chemical composition and dielectric constant of the thin film were $SiO_{0.27}C_{1.94}$ and 1.2, respectively. Mechanical property measured using nanoindentor shows 1.37 GPa.

Keywords

References

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