Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Hydrophobic Properties of PTFE Thin Films Deposited on Glass Substrates Using RF-Magnetron Sputtering Method

고주파 마그네트론 스퍼터링 방법을 사용하여 유리 기판 위에 증착된 PTFE 박막의 발수 특성

  • Kim, Hwa-Min (Department of Electronics Engineering, Catholic University of Daegu) ;
  • Kim, Dong-Young (Department of Electronics Engineering, Catholic University of Daegu)
  • 김화민 (대구가톨릭대학교 전자공학과) ;
  • 김동영 (대구가톨릭대학교 전자공학과)
  • Received : 2010.08.11
  • Accepted : 2010.10.23
  • Published : 2010.11.01
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Abstract

The polytetrafluoroethylene (PTFE) films are deposited on glass using conventional rf-magnetron sputtering method. Their hydrophobic properties are investigated for application as an anti-fouling coating layer on the screen of displays. It is found that the hydrophobicity of PTFE films largely depends on the sputtering conditions, such as Ar gas flow and deposition time during sputtering process. These conditions are closely related to the deposition rate or thickness of PTFE film. Thus, it is also found that the deposition rate or the film thickness affects sensitively the geometrical morphology formed on surface of the rf-spluttered PTFE films. In particular, the PTFE film with 1950 nm thickness deposited for 30 minute at rf-power 50 W shows a very excellent optical transmittance of over 90% and a good anti-fouling property and a good durability.

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References

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