Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Vibration Analysis of the Tapping AFM Microcantilevers Using Proper Orthogonal Decomposition

적합직교분해법을 이용한 AFM 마이크로캔틸레버의 진동해석

  • 홍상혁 (서울대학교 대학원 기계항공공학부) ;
  • 이수일 (서울시립대학교 기계정보공학과)
  • Published : 2010.04.20
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Abstract

The proper orthogonal decomposition(POD) is used to the vibration analysis of microcantilever in tapping mode atomic force microscopy(AFM). The proper orthogonal modes (POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. We present recent ideas based on POD and detailed experiments that yield new perspectives into the microscale structures such as the tapping cantilever. The linearized modeling technique based on POD is very useful to show the principal characteristics of the complex dynamic responses of the AFM microcantilever.

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References

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Cited by

  1. Vibration Analysis of AFM Microcantilevers Using an Equivalent Stiffness Element Model vol.39, pp.5, 2015, https://doi.org/10.3795/KSME-A.2015.39.5.461