Browse > Article
http://dx.doi.org/10.5050/KSNVE.2010.20.4.414

Vibration Analysis of the Tapping AFM Microcantilevers Using Proper Orthogonal Decomposition  

Hong, Sang-Hyuk (서울대학교 대학원 기계항공공학부)
Lee, Soo-Il (서울시립대학교 기계정보공학과)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.20, no.4, 2010 , pp. 414-421 More about this Journal
Abstract
The proper orthogonal decomposition(POD) is used to the vibration analysis of microcantilever in tapping mode atomic force microscopy(AFM). The proper orthogonal modes (POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. We present recent ideas based on POD and detailed experiments that yield new perspectives into the microscale structures such as the tapping cantilever. The linearized modeling technique based on POD is very useful to show the principal characteristics of the complex dynamic responses of the AFM microcantilever.
Keywords
Atomic Force Microscopy; Proper Orthogonal Decomposition; Microcantilever;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Kerschen, G., Golinval, J. C., Vakakis, A. F. and Bergman, L. A., 2005, "The Method of Proper Orthogonal Decomposition for Dynamical Characterization and Order Reduction of Mechanical Systems: an Overview," Nonlinear Dynamics, Vol. 41, pp. 147-169.   DOI
2 Kerschen, G. and Golinval, J. C., 2002, "Physical Interpertation of the Proper Orthogonal Modes Using the Singular Value Decomposition," Journal of Sound and Vibraton, Vol. 249, pp. 849-865.   DOI
3 Holmes, P., Lumley, J. L. and Berkooz, G., 1996, "Turbulence, Coherent Structures, Dynamical Systems and Symmetry," Cambridge University Press.
4 Azeez, M. F. A. and Vakakis, A. F., 2001, "Proper Orthogonal Decomposition(POD) of a Class of Vibroimpact Oscillations," Journal of Sound and Vibration, Vol. 240, pp. 859-889.   DOI
5 Park, S. K., Kim, Y. H. and Ha, S. K., 2002, "Analysis of Dynamic Behavior of Piezoelectric Atomic Force Microscope Cantilever," Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 12, No. 2, pp. 187-194.   과학기술학회마을   DOI
6 Sone, H., Fujinuma, Y., Hieida, T. and Hosaka, S., 2003, "Pico-gram Mass Deviation Detected by Resonance Frequency Shift of AFM Cantilever," SICE Annual Conference, pp. 2121-2124.
7 Beaulieu, L. Y., Godin, M., Laroche, O., Tabard-Cossa, V. and Grutter, P., 2007, "A Complete Analysis of the Laser Deflection Systems used in Cantilever-based Systems," Ultramicroscopy, Vol. 107, pp. 422-430.   DOI
8 Lee, S. I., Hong, S. H. and Lee, J. M., 2008, "Nano Scale Surface Property Estimation Using Proper Orthogonal Decomposition in Atomic Force Microscopy," CIRPAnnals, Vol. 57, No. 1, pp. 563-566.
9 Maugis, D., 1999, "Contact, Adhesion and Rupture of Elastic Solids," Springer