Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Fabrication and Characterization of Transparent Piezoresistors Using Carbon Nanotube Film

탄소나노튜브 필름을 이용한 투명 압저항체의 제작 및 특성 연구

  • Lee, Kang-Won (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Lee, Jung-A (Advanced Technology Division, Korea Institute of Standards and Science) ;
  • Lee, Kwang-Cheol (Advanced Technology Division, Korea Institute of Standards and Science) ;
  • Lee, Seung-Seob (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 이강원 (KAIST 기계공학부) ;
  • 이정아 (한국표준과학연구원 전략기술연구부) ;
  • 이광철 (한국표준과학연구원 전략기술연구부) ;
  • 이승섭 (KAIST 기계공학부)
  • Received : 2010.05.28
  • Accepted : 2010.10.21
  • Published : 2010.12.01
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Abstract

We present the fabrication and characterization of transparent carbon nanotube film (CNF) piezoresistors. CNFs were fabricated by vacuum filtration methods with 65?92% transmittance and patterned on Au-deposited silicon wafer by photolithography and dry etching. The patterned CNFs were transferred onto poly-dimethysiloxane (PDMS) using the weak adhesion property between the silicon wafer and the Au layer. The transferred CNFs were confirmed to be piezoresistors using the equation of concentrated-force-derived resistance change. The gauge factor of the CNFs was measured to range from 10 to 20 as the resistance of the CNFs increased with applied pressure. In polymer microelectromechanical systems, CNF piezoresistors are the promising materials because of their high sensitivity and low-temperature process.

본 논문에서는 탄소나노튜브 필름을 이용한 투명 압저항체의 제작 및 특성 연구를 수행하였다. 진공필터 방식으로 제작된 다양한 투과도를 가지는 탄소나노튜브 필름은 금층이 증착된 실리콘 기판위에서 사진식각 공정을 통해 패터닝이 된 후, 금층과 실리콘 기판의 약한 접착력으로 인해 실리콘 러버인 poly-dimethysiloxane (PDMS) 로 전사된다. 탄소나노튜브 필름의 압저항 특성을 분석하기 위해, 얇은 PDMS 멤브레인의 처짐에 대한 탄소나노튜브 필름의 저항 변화를 측정하여 10-20 의 개이지 팩터를 얻었으며, 인가 압력에 대한 저항 변화 실험을 수행하였다. 본 실험을 통하여 탄소나노튜브 필름은 폴리머 멤스의 다양한 응용분야에 투명한 압저항체로 사용될 수 있을 것으로 판단한다.

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