A Study on the Ballast Design of a Inductively Coupled Plasma Light Source based on Oscillation Theory

발진 이론에 근거한 유도결합형 방전광원의 안정기 설계에 관한 연구

  • 김철진 (한라대학교 전기전자제어공학부) ;
  • 임연찬 (한국생산기술연구원)
  • Published : 2009.06.01

Abstract

We studied on the design of electrical parameters for ICP(Inductively Coupled Plasma) light sources which can be effective to improve the electrical power efficiency of it. These parameters were derivated from Barkhausen theory about the oscillating condition of a ballaster. The relationships of $f-I_p$ and f-n were calculated theoretically and then these relationships were compared with the measured results about $I_p$ and power depending to a discharge length(l) of ICP light source. Finally, we can see that a specific range of induced current depending to a discharge length would be necessary to minimize the change of magnetization inductance and driving frequency at driving.

Keywords

References

  1. Miroslav sedlacek , 'Electron Physics of Vacuum and Gaseous Devices', JOHN WILEY & SONS, INC., pp386-408, 1996
  2. Brian Chapman, 'Glow Discharge Processessputtering and plasma etching,' JOHN WILEY & SONS, INC., pp.65-72, 1980
  3. R. O. Dendy, 'Plasma Dynamics,' CLARENDON PRESS . OXFORD, pp 8-18, 1990
  4. Herbert B. Callen, 'Thermodynamics and an Introduction to Thermostatistics', Second Edition, John Wiley & Sons Inc., pp 289-306, 1987
  5. Federick Reif, 'Fundamentals of Statistical and Thermal Physics', International Edition, MacGRAW-HILL, pp 239-247, 1987
  6. J. R. Coaton and A. M. Marsden, 'Lamps and Lighting', Fourth Edition, ANRNOLD, pp 1-336, 1997
  7. James T. Dakin, James A. Leonard, Stuart A. Mucklejohn and Gergely Ormandlaky, 'Ceramic Metal Halide Lamp', US Patent, No. 6,731,068,B2, 2004
  8. Michio Takagaki, Takeshi Fukuyo, Shinchi Irisawa, 'Mercury-Free Arc Tube for a Discharge', US Patent, No. 7,170,230,B2, 2007
  9. Walter P. Lalatovich, Sharon L. Ernest, Susan L. Callahan, Robert J Karlotski and Janice T. Karlotski, 'Mercury Free Discharge Lamp with Zinc Iodine', US Patent, No. 6,853,140,B2, 2005
  10. G. M. J F. Luijks, S. Nijdam and H. V. Esveld, 'Electrode diagnostics and modelling for ceramic metal halide lamps', J. Phys. D: Appl. Phys., Vol. 38, pp 3163-3169, 1997 https://doi.org/10.1088/0022-3727/38/17/S17
  11. Baldur Eliasson and Ulrich Kogelschatz, 'Nonequilibrium Volume Plasma Chemical Processing', IEEE Trans. Plasma Sci., Vol. 19, pp 1063-1077, 1991 https://doi.org/10.1109/27.125031
  12. Ulrich Kogelschartz, Baldur Eliasson and Walter Egli, 'From ozone generators to flat television screens: history and future potential of dielectric-barrier discharges', Pure Appl/ Chem., Vol. 71, pp 1819-1828, 1999 https://doi.org/10.1351/pac199971101819
  13. u. Kogelschatz, H. Esrom, J-Y. Zhang, I. W. Boyd, 'High-intensity sources of incoherent UV and VUV excimer radiation for low-temperature materials processing', Appl. Surf. Sci., Vol. 168, pp 29-36, 2000 https://doi.org/10.1016/S0169-4332(00)00571-7
  14. Robert, E., Sarroukh, H., Cachoncinlle, C., Viladrosa, R., Hochet, V., Ed daoui, S., Pouvesle, J M., 'Spectroscopic and electrical study of rare-g as-based, hollow cathode luminescent discharges:Application to the life time and efficiency enhancement of mercury-free signs', Pure and appli ed chemistry. : Chimie pure et appliquee, Vol. 77, No. 2, pp.463-474, 2005 https://doi.org/10.1351/pac200577020463
  15. Harold Chestnut and Robert W. Mayer, 'Servomechanism and Regulating System Design', Wiley, New York, 1955
  16. Alysson Raniere Seidel, Fabio Ecke Bisogno, Humberto Pinheiro and Ricardo Nederson do Prado, 'Self-Oscillating Dimmable Electronic Ballast', IEEE Trans. Ind. Elec., Vol. 50, pp 1267-1274, 2003 https://doi.org/10.1109/TIE.2003.819696
  17. Ricardo N. do Prado, Saul A. Bonaldo Diego S. Greff, Fabio E. Bisogno, 'A Unity Power Factor Electronic Ballast for Fluorescent Lighting', IEEE Industry Application Society, Annual Meeting, pp 2366-2371, October 1997 https://doi.org/10.1109/IAS.1997.626394