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A Study on the Ballast Design of a Inductively Coupled Plasma Light Source based on Oscillation Theory  

Kim, Cherl-Jin (한라대학교 전기전자제어공학부)
Yim, Youn-Chan (한국생산기술연구원)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.58, no.6, 2009 , pp. 1110-1115 More about this Journal
Abstract
We studied on the design of electrical parameters for ICP(Inductively Coupled Plasma) light sources which can be effective to improve the electrical power efficiency of it. These parameters were derivated from Barkhausen theory about the oscillating condition of a ballaster. The relationships of $f-I_p$ and f-n were calculated theoretically and then these relationships were compared with the measured results about $I_p$ and power depending to a discharge length(l) of ICP light source. Finally, we can see that a specific range of induced current depending to a discharge length would be necessary to minimize the change of magnetization inductance and driving frequency at driving.
Keywords
Discharge length; Barkhausen criterion; Inductively coupled plasma; Half-bridge; coil turns;
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