한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제26권4호
  • /
  • Pages.128-133
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  • 2009
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

SIMION 시뮬레이터를 이용한 정전렌즈의 빔 집속 성능

Beam Focusing Performance of Electrostatic Lens using SIMION Simulator

  • 오맹호 (한국산업기술대학교 지식기반기술에너지대학원) ;
  • 정인승 (연세대학교 물리학과) ;
  • 이종항 (한국산업기술대학교 기계공학과)
  • Oh, Maeng-Ho (Graduate School of Knowledge-based Technology & Energy, Korea Polytechnic Univ.) ;
  • Jeong, In-Sung (Department of physics, Yonsei Univ.) ;
  • Lee, Jong-Hang (Department of Mechanical Engineering, Korea Polytechnic Univ.)
  • 발행 : 2009.04.01
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초록

Focused-ion-beam (FIB) system is capable of both machining and measuring in nano-scale; hence nano-scale focusing quality is important. This paper investigates design parameters of two electrostatic lenses in order to achieve the best ion beam focusing performance. Commercial SIMION simulator is used to optimize the dimensions of the condenser and objective lenses and investigate the influence of assembly error on focusing quality The simulation results show that the beam focusing quality is not influenced by angle deviation within ${\pm}0.02\;deg$ and geometrical eccentricity within ${\pm}50$ micrometers.

키워드

참고문헌

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