Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

A Study on the Machining Characteristic of DLC Coated Mold Material Using FIB

FIB를 이용한 DLC소재의 가공공정에 관한 연구

  • 홍원표 (한국생산기술연구원 융합생산기술연구부) ;
  • 최병열 (한국생산기술연구원 디지털협업지원센터) ;
  • 강은구 (한국생산기술연구원 디지털협업지원센터) ;
  • 이석우 (한국생산기술연구원 디지털협업지원센터) ;
  • 최헌종 (한국생산기술연구원 디지털협업지원센터)
  • Published : 2009.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

FIB has been commonly used as a very powerful tool in the semiconductor industry. It is mainly used for mask repair, device correction, failure analysis and IC error correction, etc. Currently, FIB is not being applied to the fabrication of the micro and nano-structured mold, because of low productivity. And also sputtering rate has been required to fabricate 3D shape. In the paper, we studied the FIB-Sputtering rate according to mold materials. And surface roughness characteristics had been analysed for micro or nano mold fabrication. Si wafer, Glassy Carbon, STAVAX and DLC that have been normally considered as good micro or nano mold materials were used in the study.

Keywords

References

  1. Dubner, A. D., 1990, "Mechanism of Ion Beam Induced Deposition," Doctoral Thesis, Massachusetts Institute of Technology
  2. Noriko, N. and Masafumi, T., 2007, "Nano-Fabrication Utilizing Point Defects Induced by Ion-Implantation," Surface and Coatings Technology, Vol.201, pp. 8521-8525 https://doi.org/10.1016/j.surfcoat.2006.09.315
  3. Youn, S. W., Takahashi, M., Goto, H. and Maeda, R. 2007, "Fabrication of Micro-Mold for Glass Embossing Using Focused Ion Beam, Femto-Second Laser, Eximer Laser And Dicing Techniques," Journal of Materials Processing Technology, Vol.187-188, pp. 326-330 https://doi.org/10.1016/j.jmatprotec.2006.11.120
  4. Youn, S. W., Takahashi, M., Goto, H. and Maeda, R., 2006, "Microstructuring of Glassy Carbon Mold for Glass Embossing-Comparison of Focused Ion Beam, Nano/Femtosecond-Pulsed Laser and Mechanical Machining," Microelectronic Engineering, Vol.83, pp. 2482-2492 https://doi.org/10.1016/j.mee.2006.05.007
  5. Kuhnke, M., Lippert, T., Ortelli, E., Scherer, G. G. and Wokaun, A., 2004, "Microstructuring of Glassy Carbon: Comparison of Laser Machining and Reactive Ion Etching," Thin Solid Films, Vol.453-454, pp. 36-41 https://doi.org/10.1016/j.tsf.2003.11.156
  6. Jeong, J. I, Yang, J. H., Park, Y. H., Lee, K. H. and Kim H. K., 2007, "Effect of the Ion Beam Conditions and Interlayer on the Formation of Diamond-Like Carbon Films," RIST Research Report, Vol.21, pp. 49-56
  7. Lee, S. W., Kang, E. G., Choi, B. Y., Hong, W. P. and Choi, H. Z., 2007, "Analysis of FIB-Sputtering Characteristics on Glassy Carbon," KSPE Spring Conference, pp. 767-768
  8. Kang, E. G., Choi, B. Y., Hong, W. P., Lee, S. W. and Choi, H. Z., 2007, "Nano-Pattering Characteristics Using FIB-Sputtering Technology for DVD Mols," J. of Industrial Technology, Vol.16, pp. 158-169
  9. Kang, E. G., Choi, B. Y., Hong, W. P., Lee, S. W. and Choi, H. Z., 2006, "FIB Processing Technology for Nano Stamp," KSPE Autumn Conference, pp. 539-540
  10. Hong, W. P., Kang, E. G., Choi, B. Y., Lee, S. W. and Choi, H. Z., 2006, "Development of the Process to Minimize the Redeposition Effect for FIB Technology,” J. of Industrial Technology, Vol.15, pp. 56-67