설비공학논문집 (Korean Journal of Air-Conditioning and Refrigeration Engineering)

  • 제21권1호
  • /
  • Pages.33-40
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  • 2009
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  • 1229-6422(pISSN)
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  • 2465-7611(eISSN)
대한설비공학회 (The Society of Air-Conditioning and Refrigerating Engineers of Korea)
권호 표지

압전 구동방식 마이크로 펌프에서 기하학적 형상과 작동조건에 따른 점핑특성에 대한 실험적 연구

An Experimental Study on the Pumping Characteristics of Diffuser/Nozzle Based Piezoelectric Micropumps with Different Geometries and Operating Conditions

  • 용정권 (경희대학교 기계공학과) ;
  • 김창녕 (경희대학교 테크노공학대학) ;
  • 김진욱 (경희대학교 기계공학과)
  • Yong, Jung-Kwon (Department of Mechanical Engineering, Kyunghee University) ;
  • Kim, Chang-Nyung (College of Advanced Technology, Kyunghee University) ;
  • Kim, Chin-Uck (Department of Mechanical Engineering, Kyunghee University)
  • 발행 : 2009.01.10
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초록

In the present experimental study, the pumping performances of diffuser/nozzle based piezoelectric micropumps are estimated with different operating factors and geometries. Here, the effects of the input voltage and frequency on the pumping performances have been examined together with the influences of the positions of the inlet and outlet. The results show that the flow rate of the micropump is larger with larger input voltage with the largest flow rates for the frequency to be close to 6.0 Hz all through the current experimental study. Also, it has been found that the positions of the inlet and outlet affect much on the performance of the piezoelectric micropumps. Error estimation has been carried out for the evaluation of the pumping performance in association with the uncertainty of the measurement.

키워드

참고문헌

  1. Stemme, E. and Stemme, G., 1993, A valveless diffuser/nozzle-based fluid pump, Sensors and Actuators A, Vol. 39, pp. 159-167 https://doi.org/10.1016/0924-4247(93)80213-Z
  2. Olsson, A., Enoksson, P., Stemme, G. and Stemme, E., 1997, Micromachined flat-walled valveless diffuser pumps, Journal of Microelectromechanical Systems, Vol. 6, No. 2, pp. 161-166 https://doi.org/10.1109/84.585794
  3. Olsson, A., Stemme, G. and Stemme, E., 2000, Numerical and experimental studies of flat-walled diffuser elements for valveless micropumps, Sensors and Actuators A, Vol. 84, pp. 165-175 https://doi.org/10.1016/S0924-4247(99)00320-9
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