Korean Journal of Metals and Materials (대한금속재료학회지)

The Korean Institute of Metals and Materials (대한금속재료학회)
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Microstructure Analysis of Fe Thin Films Prepared by Ion Beam Deposition

이온빔 증착법에 의해 제조된 철박막의 미세조직 분석

  • Kim, Ka Hee (Advanced Technology Center for Information Electronic Materials and Components, National Nanofab Center) ;
  • Yang, Jun-Mo (Advanced Technology Center for Information Electronic Materials and Components, National Nanofab Center) ;
  • Ahn, Chi Won (Advanced Technology Center for Information Electronic Materials and Components, National Nanofab Center) ;
  • Seo, Hyun Sang (Advanced Technology Center for Information Electronic Materials and Components, National Nanofab Center) ;
  • Kang, Il-Suk (Advanced Technology Center for Information Electronic Materials and Components, National Nanofab Center) ;
  • Hwang, Wook-Jung (Advanced Technology Center for Information Electronic Materials and Components, National Nanofab Center)
  • 김가희 (나노종합팹센터 정보전자부품소재기술혁신센터) ;
  • 양준모 (나노종합팹센터 정보전자부품소재기술혁신센터) ;
  • 안치원 (나노종합팹센터 정보전자부품소재기술혁신센터) ;
  • 서현상 (나노종합팹센터 정보전자부품소재기술혁신센터) ;
  • 강일석 (나노종합팹센터 정보전자부품소재기술혁신센터) ;
  • 황욱중 (나노종합팹센터 정보전자부품소재기술혁신센터)
  • Received : 2008.03.23
  • Published : 2008.07.25
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Abstract

High purity Fe thin films were prepared by the ion beam deposition method with $^{56}Fe^{+}$ions on the Si substrate at the room temperature. The Fe thin films were deposited at the ion energy of 50 eV and 100 eV. Microstructural properties were investigated on the atomic scale using high-resolution transmission electron microscopy (HRTEM). It was found that the Fe thin film obtained with the energy of 50 eV having an excellent corrosion resistance consists of the amorphous layer of ~15 nm in thickness and the bcc crystalline layer of about 30 nm in grain size, while the thin film obtained with the energy of 100 eV having a poor corrosion resistance consists of little amorphous layer and the defective crystalline layer. Furthermore the crystal structures and arrangements of the oxide layers formed on the Fe thin films were analyzed by processing of the HRTEM images. It was concluded that the corrosion behavior of Fe thin films relates to the surface morphology and the crystalline structure as well as the degree of purification.

Keywords

Acknowledgement

Supported by : 지식경제부

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