Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Preparation of Ta-doped $TiO_2$ thin rums by co-sputtering and their photo-electrode properties

동시스퍼터법에 의한 Ta 도핑된 $TiO_2$ 박박 합성과 광전극 특성

  • Yoon, Jong-Won (Department of Advanced Materials Science and Engineering, Dankook University)
  • 윤종원 (단국대학교 신소재공학과)
  • Published : 2008.08.31
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Abstract

Ta-doped thin films were deposited on quartz and indium-tin oxide glass substrates using a co-sputtering method. The Ta-doped films formed a solid solution that induced structural changes from rutile to anatase phase. The anodic photocurrents of the Ta-doped $TiO_2$ electrodes were observed not only in UV but also in the visible light range. The photocurrent response in visible light on Ta-doped $TiO_2$ films are due to bandgap reduction.

동시스퍼터법을 이용하여 Ta이 도핑된 $TiO_2$ 박막을 석영 및 ITO 기판위에 제작하였다. Ta의 도핑량은 동시스퍼터법에 의하여 조절되는 Ta 금속선 길이에 의하여 제어 되었다. Ta이 도핑된 $TiO_2$ 박막은 rutile상에서 anatase상으로 구조변화를 유발 시키며 고용체를 형성했다. Ta의 도핑량이 증가함에 따라 rutile상 보다는 anatase상이 많은 것으로 나타났다. XPS 분석에 따르면 도핑된 Ta은 금속이 아닌 $Ta_2O_5$의 산화물을 형성하는 것으로 나타났다. Ta이 도핑된 $TiO_2$ 전극에서는 자외선(UV) 영역을 포함하여 가시광(VIS) 영역의 빛의 조사에 광전류응답 특성을 발현하였다. 가시광선 영역에서 발현된 광전류 응답 특성은 Ta 도핑에 의하여 $TiO_2$ 밴드갭내에 불순물 준위의 형성에 기인한 것으로 사료된다.

Keywords

References

  1. A. Taleb, C. Petit and M.P. Pileni, "Optical properties of self-assembled 2D and 3D superlattices of silver nanoparticles", J. Phys. Chem. B 102 (1998) 2214 https://doi.org/10.1021/jp972807s
  2. G. Hyashi, M. Kataoka and K. Yamamoto, "Photoluminescence spectra of carbon clusters embedded in $SiO_2$", Jpn. J. Appl. Phys. Part 2 32 (1993) L274 https://doi.org/10.1143/JJAP.32.L274
  3. V. Joudrieri, P. Bourdon, F. Hache and C. Flytzanis, "Nonlinear light scattering in a two-component medium: Optical limiting application", Appl. Phys. B: Lasers Opt. 67 (1998) 627 https://doi.org/10.1007/s003400050557
  4. A. Dawson and P.V. Kamat, "Semiconductor-metal composite nanostructures. to what extent do metal nanoparticles improve the photocatalytic activity of $TiO_2$ films", J. Phys. Chem. B 105 (2001) 11439 https://doi.org/10.1021/jp011118k
  5. A. Sobczynski, A.J. Bard, A. Campion, M.A. Fox, T. Mallouk, S.E. Webber and J.M. White, "Photoassisted hydrogen generation: platinum and cadmium sulfide supported on separate particles", J. Phys. Chem. 91 (1987) 3316 https://doi.org/10.1021/j100296a041
  6. J.-W. Yoon, T. Sasaki, N. Koshizaki and E. Traversa, "Preparation and characterization of $M/TiO_2$ (M = Ag, Au, Pt) nanocomposite thin films", Scripta Mater. 44 (2001) 1865 https://doi.org/10.1016/S1359-6462(01)00732-1
  7. J.-W. Yoon, T. Sasaki and N. Koshizaki, "Photoelectrochemical behavior of $Pt/TiO_2$ nanocomposite thin films prepared by pulsed laser deposition", Appl. Surf. Sci. 197-198 (2002) 684 https://doi.org/10.1016/S0169-4332(02)00445-2
  8. J.-W. Yoon, T. Sasaki and N. Koshizaki, "Photoelectrode properties of nanocomposite thin films based on interfacing nanosized noble metal and $TiO_2$", Electrochem. Sold-State. Lett. 5 (2002) A256 https://doi.org/10.1149/1.1511341
  9. D. Madare, M. Tasaca, M. Delibas and G.I. Rusu, "On the structural properties and optical transmittance of $TiO_2$ r.f. sputtered thin film", Appl. Surf. Sci. 156 (2000) 200 https://doi.org/10.1016/S0169-4332(99)00508-5
  10. J.F. Moulder, W.F. Sickle, P.E. Soble, K.D. Bomben and J. Chastain, "Handbook of X-ray photoelectron spectroscopy" Perkin-Elmer, Eden Prairie, MN (1992)