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Preparation of Ta-doped $TiO_2$ thin rums by co-sputtering and their photo-electrode properties  

Yoon, Jong-Won (Department of Advanced Materials Science and Engineering, Dankook University)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.18, no.4, 2008 , pp. 165-168 More about this Journal
Abstract
Ta-doped thin films were deposited on quartz and indium-tin oxide glass substrates using a co-sputtering method. The Ta-doped films formed a solid solution that induced structural changes from rutile to anatase phase. The anodic photocurrents of the Ta-doped $TiO_2$ electrodes were observed not only in UV but also in the visible light range. The photocurrent response in visible light on Ta-doped $TiO_2$ films are due to bandgap reduction.
Keywords
$TiO_2$; Ta; Thin films; co-sputtering; XRD; FE-SEM; XPS; Photocurrent;
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