한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제25권7호
  • /
  • Pages.87-94
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  • 2008
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

비점수차법을 이용한 초정밀변위측정법 연구

Precision Displacement Measurement Using Astigmatism

  • 발행 : 2008.07.01
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초록

The displacement sensor using optical pickup head is presented. The measuring principle of optical pickup head in focusing direction is adopted to measure displacement. The preliminary tests were carried out to verify the feasibility of the optical pickup head as a displacement sensor and optical pickup head showed about $8\;{\mu}m$ measuring range and 10nm resolution. The methodology to expand measuring range is proposed and proved its validity. The proposed displacement sensors are applied to AFM(Atomic Force Microscope) probe head to measure the deflection of micro-cantilever.

키워드

참고문헌

  1. Saito, Y., Gao, Wei. and Kiyono, S., 'A Single Lens Micro-Angle Sensor,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No.2, pp. 14-20, 2007
  2. Choi, S. C., Park, J. W., Kim, Y. W. and Lee, D. W., 'Self Displacement Sensing (SDS) Nano Stage,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 70-75, 2007
  3. Park, J. H., Lee, S. H. and Baek, Y. S., 'Mechanism Design of Optical Pickup Actuator for Fast Access of Optical Disk Drive,' J. of KSPE, Vol. 19, No. 12, pp. 109-119, 2002
  4. Jun, H. G. and Park, Y. P., 'Velocity Profile Analysis to Reduce Residual Vibration in Optical Pick-up,' Trans. Of KSNVE, Vol. 10, No. 2, pp. 221-228, 2000
  5. Hnilicka, B., Besancon-Voda, A., Schroder, H. -J. and Filard, G., 'Modelling the focus error characteristic of a DVD player,' Proceedings of the 2002 IEEE International Conference on Control Applications, pp. 629-630, 2002
  6. Wright, F. E., 'The Methods of Petrographic-microscopic Research, Their Relative Accuracy,' Carnegie Institution of Washington, p. 204, 1911
  7. Lee, S. H. and Jung K. S., 'Magnetic Manipulation of a Microcantilever for a New Concept in Atomic Force Microscopy,' IEEE Trans on Magnetics, Vol. 43, No. 6, pp. 2737-2739, 2007 https://doi.org/10.1109/TMAG.2007.893869