Journal of information and communication convergence engineering

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Realization of FBAR Devices for Broadband WiMAX Applications

  • Mai, Linh (School of Engineering, Information and Communications University (ICU)) ;
  • Lee, Jae-Young (School of Engineering, Information and Communications University (ICU)) ;
  • Pham, Van Su (School of Engineering, Information and Communications University (ICU)) ;
  • Yoon, Gi-Wan (School of Engineering, Information and Communications University (ICU))
  • Published : 2008.03.31
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Abstract

Effects of the addition of Cr adhesion layer to $W/SiO_2$ multilayer Bragg reflectors on the resonance characteristics of film bulk acoustic wave resonator (FBAR) devices are presented. Main resonance peaks could be significantly shifted to higher frequency, mainly due to the addition of Cr adhesion layer to multilayer Bragg reflectors and control of the bottom electrode thickness as well. The FBAR devices with the Cr adhesion layer in Bragg reflectors could result in much more improved resonance characteristics at about 3 GHz in terms of return loss and Q-factor.

Keywords

References

  1. WiMAX forum, (March 2007). "Empowering Mobile Broadband: The Role of Regulation in Bringing Mobile Broadband to the Mass Market," Available: http://www.wimaxforum.org/technology /downloads
  2. S.V. Krishnaswamy, J.F. Rosenbaum, S.S. Horwitz, and R.A. Moore, "Film bulk acoustic wave resonator and filter technology," IEEE MTT-S Dig., 1992, pp. 153-155
  3. K.M. Lakin, K.T. McCarron, and R.E. Rose, "Solidly mounted resonators and filter," IEEE Proc Ultrasonics Symposium, 1995, pp. 905-908
  4. M. Yim, D.H. Kim, D. Chai, and G. Yoon "Significant resonance characteristic improvements by combined used of thermal annealing and Co electrode in ZnO-based FBARs," IET Electron Lett, Vol. 39, 2003, pp. 1638-1640 https://doi.org/10.1049/el:20031029
  5. M. Yim, D.H. Kim, D. Chai, and G. Yoon, "Effects of thermal annealing of W/SiO2 multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodes," J.Vac.Sci. Technol. A, Vol. 22(3), 2004, pp. 465-471 https://doi.org/10.1116/1.1690248
  6. D.H. Kim, M. Yim, D. Chai, and G. Yoon, "Improvements of resonance characteristics due to thermal annealing of Bragg reflectors in ZnO-based FBAR devices," IET Electronics Lett., Vol. 39(13), 2003, pp. 962-964 https://doi.org/10.1049/el:20030638
  7. L. Mai, H-I. Song, L.M. Tuan, P.V. Su, and G. Yoon, "A comprehensive investigation of thermal treatment effects on resonance characteristics in FBAR devices," MOTLs, Vol. 47(5), 2005, pp. 459-462
  8. K.M. Lakin, G.R. Kline, and K.T. McCarron, "High-Q microwave acoustic resonators and filters," IEEE Trans Microwave Theory Tech. Vol. 41, 1993, pp. 2139-2146 https://doi.org/10.1109/22.260698
  9. S.H. Park, B.C. Seo, H.D. Park, and G. Yoon, "Film bulk acoustic resonator fabrication for radio frequency filter applications," Jpn. J. Appl. Phys., Vol. 39, 2000, pp. 4115-4119 https://doi.org/10.1143/JJAP.39.4115