• Proceedings of the KSME Conference
• /
• 2007.05a
• /
• pp.1249-1253
• /
• 2007

Experimental studies on the fabrication of sub-30 nm nanofibers using weakly two-photon induced photopolymerized region have been carried out. For the generation of nanofibers inside or outside microstructures, an over-polymerizing method involving a long exposure technique (LET) was proposed. Such nanofibers can find meaningful applications as bio-filters, mixers, and many other uses in diverse research field. A multitude of nanofibers with a notably high resolution (about 22 nm) in two-photon polymerization was achieved using the LET. Furthermore, it was demonstrated that the LET can be employed for the direct fabrication of various embossing patterns by controlling the exposure duration and the interval between voxels. Thin interconnecting networks are formed regularly in the boundary of the over-polymerized region, which allows for the creation of various pattern shapes. Overall of this work, some patterns including nanofibers are fabricated by the LET.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.31 no.12
• /
• pp.1144-1149
• /
• 2007

Experimental studies on the fabrication of sub-30 nm nanofibers using weakly two-photon induced photopolymerized region have been carried out. For the generation of nanofibers inside or outside microstructures, an over-polymerizing method involving a long exposure technique (LET) was proposed. Such nanofibers can find meaningful applications as bio-filters, mixers, and many other uses in diverse research field. A multitude of nanofibers with a notably high resolution (about 22 nm) in two-photon polymerization was achieved using the LET. Furthermore, it was demonstrated that the LET can be employed for the direct fabrication of various embossing patterns by controlling the exposure duration and the interval between yokels. Thin interconnecting networks are formed regularly in the boundary of the over-polymerized region, which allows for the creation of various pattern shapes. Overall of this work, some patterns including nanofibers are fabricated by the LET.

• Journal of the Korean Chemical Society
• /
• v.49 no.3
• /
• pp.292-299
• /
• 2005

• Journal of the Korean Society for Precision Engineering
• /
• v.24 no.1 s.190
• /
• pp.64-70
• /
• 2007

A long-exposing technique (LET) has been conducted to create nanoscale patterns applicable to diverse micro-devices using two-photon polymerization (TPP). By the weakly-polymerized region via the LET, double-layered embossing patterns can be fabricated simply in a single step. The LET makes possible a voxel and its surrounding to be fully grown into more than 500 nm in lateral size and weakly-polymerized region (WPR), respectively. In the WPR. interconnecting ribs between voxels are generated, and they lead to the creation of double-layered dot patterns. Moreover, by controlling the distance between voxels, various shapes of interconnecting rib can be fabricated when the LET is applied. Various embossing patterns were fabricated to evaluate the usefulness of the proposed technique as a novel nanopatterning technique in TPP.

• Proceedings of the Optical Society of Korea Conference
• /
• 2003.07a
• /
• pp.162-163
• /
• 2003

이광자흡수는 Χ$^{(3)}$ 의 허수부로 표현되는 3차 비선형 흡수 효과로, 이광자 흡수확률은 입사빛 세기의 제곱에 비례한다. 특수한 단량체 분자들은 이광자흡수를 통해 빛을 흡수하여 중합과정의 에너지원으로 사용한다. 이 때 에너지의 threshold가 있으므로 초점 부근에서만 반응이 일어나게 되어, 이광자흡수를 통한 광중합과정은 회절효율 한계를 벗어난 미세구조 제작에 응용된다. 또 긴 파장의 빛을 이용하므로 입사 빛이 시료에 깊이 침투하여 3차원 구조제작, 3차원 data 저장 등의 분야에서 높은 응용성을 지닌다. (중략)

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.10 s.175
• /
• pp.17-25
• /
• 2005

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.29 no.7 s.238
• /
• pp.998-1004
• /
• 2005

A nano-stereolithography (NSL) process has been developed for fabrication of 3D shell structures which can be applied to various nano/micro-fluidic devices. By the process, a complicated 3D shell structure on a scale of several microns can be fabricated using lamination of layers with a resolution of 150 nm in size, so it does not require the use of my sacrificial layer or any supporting structure. A layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) induced using a femtosecond laser processing. When the polymerization process is finished, unsolidified liquid state resins can be removed easily by dropping several droplets of ethanol fur developing the fabricated structure. Through this work, some 3D shell structures, which can be applied to various applications such as nano/micro-fluidic devices and MEMS system, were fabricated using the developed process.

• Polymer(Korea)
• /
• v.29 no.2
• /
• pp.146-150
• /
• 2005

A nano-stereolithouaphy (NSL) apparatus has been developed for fabrication of microstructures with the resolution of 150 nanometers. In the NSL process, a complicated 3D structure can be fabricated by building layer by layer, so it does not require any sacrificial layer or any supporting structure. A laminated layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) which was induced by a femtosecond laser. When the fabrication of a 3D laminated structure was finished, unsolidified liquid-stage resins were removed to develop the fabricated structure by dropping several droplets of solvent, then the polymerized structure was only left on the glass substrate. A microstructure is fabricated by vector scanning method to save the fabrication time. The shell thickness of a structure is very thin within 200 nm, when it is fabricated by a single contour scanning (SCS) path. So, a fabricated structure can be deformed easily in the developing process. In this work, a double contour scanning (DCS) method was proposed to reinforce the strength of a shell typed structure, and a microcup was fabricated to show the usefulness of the developed NSL system and the DCS method.

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.11 s.188
• /
• pp.7-16
• /
• 2006

• Journal of the Korean Society for Precision Engineering
• /
• v.33 no.4
• /
• pp.265-270
• /
• 2016

Recently, many studies have been conducted on the nano-scale fabrication technology using twophoton- absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing.