한국공작기계학회논문집 (Transactions of the Korean Society of Machine Tool Engineers)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

PZT로 구동되는 회전 스테이지의 오차 운동 분석

An Error Motion Analysis of Rotary Stage Driven By PZT

  • 김진호 (한양대학교 대학원 기계공학과) ;
  • 신동익 (한양대학교 대학원 기계공학과) ;
  • 윤덕원 (한양대학교 대학원 기계공학과) ;
  • 한창수 (한양대학교 기계공학과) ;
  • 이상무 (한국생산기술연구원) ;
  • 남경태 (한국생산기술연구원)
  • 발행 : 2008.02.15
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초록

Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.

키워드

참고문헌

  1. Donaldson, R. R., 1972, 'A Simple Method for Separating Spindle Error from Test Ball Roundness Error,' CIRP-Annals, Vol. 21/1, pp. 125-126
  2. ANSI/ASME B89.3.4M., 1985, Axes of Rotation: Methods for Specifying and Testing Standard, pp. 1-70
  3. Spragg, R. C., and Whitehouse, D. J., 1970, 'New unified approach to surface metrology,' J. of Proc Inst. Mech. Engrs., Vol. 185, pp. 697-707 https://doi.org/10.1243/PIME_PROC_1970_185_081_02
  4. Yun, D., 2005, 'Development of Manipulator for Handling Micro Components in Vacuum' KSMTE Spring Conference 2005, pp. 40-44
  5. Rouchard, G., and Lau, L., 1987, 'An Investigation Of Non-Repeatable Spindle Runout.,' IEEE Transactions on Magnetics, Vol. MAG-23, No. 5, pp. 3687-3689
  6. Whitehouse, D. J., 1976, 'Some Theoretical Aspects of Error Separation Techniques in Surface Metrology,' J. of Phys. E: Sci. Inst., Vol. 9, No. 7, pp. 531-536 https://doi.org/10.1088/0022-3735/9/7/007