한국재료학회지 (Korean Journal of Materials Research)

  • 제18권1호
  • /
  • Pages.32-37
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  • 2008
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  • 1225-0562(pISSN)
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  • 2287-7258(eISSN)
한국재료학회 (Materials Research Society of Korea)
권호 표지
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롤투롤 스퍼터 시스템을 이용하여 PET 기판위에 성막 시킨 ITO 박막의 특성 연구

Characteristics of Indium Tin Oxide Films Grown on PET Substrate Grown by Using Roll-to-Roll (R2R) Sputtering System

  • 조성우 (금오공과대학교 정보나노소재공학과) ;
  • 최광혁 (금오공과대학교 정보나노소재공학과) ;
  • 배정혁 (금오공과대학교 정보나노소재공학과) ;
  • 문종민 (금오공과대학교 정보나노소재공학과) ;
  • 정진아 (금오공과대학교 정보나노소재공학과) ;
  • 정순욱 (금오공과대학교 정보나노소재공학과) ;
  • 박노진 (금오공과대학교 정보나노소재공학과) ;
  • 김한기 (금오공과대학교 정보나노소재공학과)
  • Cho, Sung-Woo (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Choi, Kwang-Hyuk (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Bae, Jung-Hyeok (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Moon, Jong-Min (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Jeong, Jin-A (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Jeong, Soon-Wook (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Park, No-Jin (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Kim, Han-Ki (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
  • 발행 : 2008.01.31
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초록

The electrical, optical, structural and surface properties of an indium tin oxide (ITO) film grown on a flexible PET substrate using a specially designed roll-to-roll (R2R) sputtering system as a function of the DC power, $Ar/O_2$ flow ratio, and rolling speed is reported. It was observed that both the electrical and optical properties of the ITO film on the PET substrate were critically dependent on the $Ar/O_2$ flow ratio. In addition, x-ray diffraction examination results showed that the structure of the ITO film on the PET substrate was an amorphous structure regardless of the DC power and the $Ar/O_2$ flow ratio due to a low substrate temperature, which was maintained constant by a main cooling drum. Under optimized conditions, ITO film with resistivity of $6.44{\times}10^{-4}{\Omega}-cm$ and transparency of 86% were obtained, even when prepared at room temperature. Furthermore, bending test results exhibited that R2R-grown ITO film had good flexibility which would be applicable to flexible displays and solar cells.

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