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Accurate parameter extraction method for FD-SOI MOSFETs RF small-signal model including non-quasi-static effects

NQS효과를 고려한 FD-SOI MOSFET의 고주파 소신호 모델변수 추출방법

  • 김규철 (Matushita Electric Works 중앙연구소)
  • Published : 2007.10.31

Abstract

An accurate and simple method to extract equivalent circuit parameters of fully-depleted silicon-on-insulator MOSFETs small-signal modeling operating at RF frequencies including the non-quasi static effects is presented in this article. The advantage of this method is that a unique and physically meaningful set of intrinsic equivalent circuit parameters is extracted by de-embedding procedure of extrinsic elements such as parasitic capacitances and resistances of MOSFETs from measured S-parameters using simple Z- and Y- matrices calculations. The calculated small-signal parameters using the presented extraction method give modeled Y-parameters which are in good agreement with the measured Y-parameters from 0.5 to 20GHz.

본 논문에서는 NQS(non-quasi-static)효과를 고려한 FD(fully depleted)-SOI(silicon-on-insulator) MOSFETs의 고주파 소신호 모델링을 위한 등가회로 변수들을 간단하고 정확히 추출하는 방법을 제시하였다. 제시된 추출방법은 임피던스와 어드미턴스 행렬계산으로 S-파라미터의 측정 결과로부터 MOSFET의 외부 기생용량과 기생저항을 제거하여 물리적인 특성을 바탕으로 한 MOSFET의 내부등가회로변수가 간단히 추출되어진다. 제시된 방법으로 등가 회로를 구한 후 Y-파라미터를 계산하여 측정치와 비교한 결과 500MHz부터 200Hz까지 잘 일치함을 확인하였다.

Keywords

References

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