The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

A Study on the Microfabricated Clark-type Sensor for Measuring Dissolved Oxygen

용존 산소 측정용 초소형 Clark-type 센서에 대한 연구

  • 박정일 (고려대 공대 대학원 전기공학과) ;
  • 장종현 (고려대 공대 대학원 전기공학과) ;
  • 최명기 (고려대 공대 대학원 전기공학과) ;
  • 이동영 (울산대 의대 아산생명과학연구소) ;
  • 김영미 (울산대 의대 아산생명과학연구소) ;
  • 박정호 (고려대 공대 전기전자전파공학부)
  • Published : 2007.08.01
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Abstract

This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed, fabricated, and characterized a microfabircated Clark-type oxygen sensor for measuring dissolved oxygen. The microfabricated oxygen sensor consists of 3-electrodes on a glass substrate, a FEP (Fluorinated ethylene propylene) oxygen-permeable membrane, and PDMS (Polydimethylsiloxane) reservoir for storing sample solution. Thin-film Ag/AgCl was employed as a reference electrode and its durability was verified by obtaining a stable open circuit potential for 2 hours against a commercial Ag/AgCl electrode and a stable cyclic voltammetry curve. Selectivity, response time, and linearity of the fabricated oxygen sensor were also verified well by cyclic voltammetry and amperometry depending. The fabricated oxygen sensor showed a 90% response time of 40sec and an excellent linearity with a correlation coefficient of 0.994.

Keywords

References

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