• Title/Summary/Keyword: Mmembrane

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A Study on the Microfabricated Clark-type Sensor for Measuring Dissolved Oxygen (용존 산소 측정용 초소형 Clark-type 센서에 대한 연구)

  • Park, Jung-Il;Chang, Jong-Hyeon;Choi, Myung-Ki;Lee, Dong-Young;Kim, Young-Mi;Pak, Jung-Ho
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.8
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    • pp.1450-1454
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    • 2007
  • This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed, fabricated, and characterized a microfabircated Clark-type oxygen sensor for measuring dissolved oxygen. The microfabricated oxygen sensor consists of 3-electrodes on a glass substrate, a FEP (Fluorinated ethylene propylene) oxygen-permeable membrane, and PDMS (Polydimethylsiloxane) reservoir for storing sample solution. Thin-film Ag/AgCl was employed as a reference electrode and its durability was verified by obtaining a stable open circuit potential for 2 hours against a commercial Ag/AgCl electrode and a stable cyclic voltammetry curve. Selectivity, response time, and linearity of the fabricated oxygen sensor were also verified well by cyclic voltammetry and amperometry depending. The fabricated oxygen sensor showed a 90% response time of 40sec and an excellent linearity with a correlation coefficient of 0.994.