한국재료학회지 (Korean Journal of Materials Research)

  • 제17권4호
  • /
  • Pages.222-226
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  • 2007
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  • 1225-0562(pISSN)
  • /
  • 2287-7258(eISSN)
한국재료학회 (Materials Research Society of Korea)
권호 표지
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Si 나노 입자와 Er3+를 공첨가한 SiO2계 도파로의 제작과 평가

Fabrication and characterization of SiO2 based waveguide co-doped with Si-nanocrystal and Er3+

  • 최세원 (한국생산기술연구원 광주연구센터) ;
  • 고영호 (한국생산기술연구원 광주연구센터) ;
  • 장세훈 (한국생산기술연구원 광주연구센터) ;
  • 오익현 (한국생산기술연구원 광주연구센터) ;
  • 강창석 (한국생산기술연구원 광주연구센터)
  • Choi, Se-Weon (Korea Institute of Industrial Technology, Gwangju) ;
  • Ko, Young-Ho (Korea Institute of Industrial Technology, Gwangju) ;
  • Chang, Se-Hun (Korea Institute of Industrial Technology, Gwangju) ;
  • Oh, Ik-Hyun (Korea Institute of Industrial Technology, Gwangju) ;
  • Kang, Chang-Seog (Korea Institute of Industrial Technology, Gwangju)
  • 발행 : 2007.04.27
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초록

[ $SiO_2$ ]thin films containing Si-nanocrystals and $Er^{3+}$ were fabricated by the RF-sputtering method. Intense emission of $Er^{3+}$ was observed at 1530 nm region after the annealing of the film at $1050^{circ}C$ for 5 min. Channel waveguides were fabricated using such films for the core. The films containing Si higher than 2.4 at% exhibited the change in stress from compression to tension after annealing, which induced the fatal loss-increase in waveguide. The optical gain might be attained by the Er-doped waveguide with Si lower than 2.4 at% by a visible-light-excitation.

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참고문헌

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