Behavioral Characteristics of Nano-Stages According to Hinge Structure

힌지 형태에 따른 나노 스테이지의 거동특성

  • 오현성 (부산대학교 정밀기계공학과) ;
  • 이성준 (부산대학교 정밀기계공학과) ;
  • 최수창 (부산대학교 나노융합기술학과) ;
  • 박정우 (부산대학교 나노융합기술학과) ;
  • 이득우 (부산대학교 나노융합기술학과)
  • Published : 2007.06.15

Abstract

Nano-stages are used in many ultra-precision systems, such as scanning probe microscope(SPM), optical fiber aligners, ultra-precision cutting, measuring systems, and optical systems. It is difficult to find the solutions because the performances and characteristics of nano-scale motion stage are determined by various factors. To understand effects of nano-scale motion stage, three types of hinge structures were designed and manufactured. Each hinge structures were designed following with the results of simulation. And from the result of experiments, hysteresis, displacement, and accuracy were compared with each hinge structures.

Keywords

References

  1. Elmustafa, A. A. and Lagally, M. G., 2001, 'Flexuralhinge guided motion nanopositioner stage for precision machining : finite element simulations,' Precision Engineering 25, pp. 77-81 https://doi.org/10.1016/S0141-6359(00)00058-1
  2. Ryu, J. W., Gweon, D. G. and Moon, K. S., 1997, 'Optimal design of a flexure hinge based $XY{\theta}$ wafer stage,' Precision Engineering 21, pp. 18-28 https://doi.org/10.1016/S0141-6359(97)00064-0
  3. Ryu, J. W. and Gweon, D. G., 1997, 'Error analysis of a flexure hinge mechanism induced by machining imperfection,' Precision Engineering 21, pp. 83-89 https://doi.org/10.1016/S0141-6359(97)00059-7
  4. Gweon, G. D., 2004, 'Flexure motion Guide design,' KAIST, KAIST Mech. Engineering, 6th Workshop
  5. Suleman, A., Burns, S. and Waechter, D., 2004, 'Design and modeling of an electrostrictive inchworm actuator,' Mechatronics 14, pp. 567-586 https://doi.org/10.1016/j.mechatronics.2003.10.007
  6. He, L., Wang, F. Z., Mapps, D. J., Robinson, P., Jenkins, D. and Clegg, W. W., 2000, 'Nanoscale positioning for magnetic recording,' Sensors and Actuators, 81, pp. 313-316 https://doi.org/10.1016/S0924-4247(99)00099-0
  7. Paros, J. M., Weisbord, L., 2001, 'How to design flexure hinges,' Mach. Des., Vol, 25, pp. 151-156
  8. Lobontiu, L. and Jeffrey, S. N., 2001, 'Corner-Filleted flexure hinges,' Paine, September, Vol. 123, pp. 346-352
  9. Lobontiu, N. and Jeffrey S. N., 2002, 'Design of Circular Cross-section Corner-Filleted Flexure Hinges for Three-Dimensional Compliant Mechanism,' Paine, september Vol. 124, pp. 479-484