Development of Active Vibration Isolation Equipments Using Fuzzy Method

Vibration isolation equipments are mostly required in precise measurement and manufacturing system. Among all the vibration isolation equipments, air-spring is the most widely used equipment because of low resonant frequency and high damping ratio. In this study, we used Takagi-Sugeno fuzzy method to design an active vibration isolation system using air-spring, and compared the fuzzy method with passive control method and PID control method. Due to the non-linearity characteristics of air-spring, fuzzy controller was verified to be the most effective both in simulation and experiment.