Journal of Electrical Engineering and Technology

  • 제2권2호
  • /
  • Pages.263-266
  • /
  • 2007
  • /
  • 1975-0102(pISSN)
  • /
  • 2093-7423(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지
DOI QR코드

DOI QR Code

A Nickel Micro Switch Operating in a Wide Range of Torsion Angles

  • Kahng, Seong-Joong (System LSI Division, Samsung Electronics Co.) ;
  • Kim, Jae-Hyeok (HMED Lab. Dept. of Electrical, Information and Control Engineering, Hongik University) ;
  • Kim, Young-Min (HMED Lab. Dept. of Electrical, Information and Control Engineering, Hongik University)
  • 발행 : 2007.06.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

We report a nickel optical MEMS switch, being able to rotate through a large angle and to accommodate multiple channels. The proposed optical switch consists of a thin nickel mirror and two torsion springs supporting the mirror. The torsion springs are designed using a finite element method (FEM) such that plastic deformation of the thin nickel is avoided during the large torsion actuation. For switching speed improvement, transient vibration of the released mirror is suppressed by optimizing the mirror design and a fast switching response of $200\;{\mu}s\;(pull-down)/300\;{\mu}s\;(pull-up)$ is demonstrated.

키워드

참고문헌

  1. J. E. Ford, V. A. Aksyuk, D. J. Bishop, and J. A. Walker, 'Wavelength add-drop switching using tilting micromirrors', J. Lightwave Technol., No. 5, 17 pp. 904, 1999
  2. H. Toshiyoshi and H. Fujita, 'Electrostatic micro torsion mirrors for an optical switch matrix', J. Microelectromechanical Systems, Issue. 4, 5 pp. 231, May 1996
  3. M. Urano, H. Ishii, Y. Tanabe, T. Shimamura, T. Sakata, T. Kamei, K. Kudou, M. Yano and K. Machida, 'Novel fabrication process and structure of a low-voltage-operation micromirror array for optical MEMS switches', Proc. IEEE Int. Electron Devices Meeting, IEDM '03 Technical Digest. pp. 39.5.1, 2003
  4. L. Y. Lin, E. L. Goldstein and R. W. Tkach, 'On the expandability of free-space micromachined optical cross connects', J. Lightwave Technol., No. 4, 18 pp. 482, 2000
  5. J. H. Kim, H. K. Lee, B. I. Kim, J. W. Jeon, J. B. Yoon and E. Yoon, 'A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in largescale optical switch', Proc. IEEE 16th Int. Conf. MEMS-03 Kyoto pp. 259, 2003
  6. L. J. Hornbeck, 'Digital Light Processing and MEMS: an overview', Proc. Advanced Applications of Lasers, 1996/Broadband Optical Networks/Smart Pixels/Optical MEMs and their Applications, /LEOS 1996 Summer Topical Meetings pp. 7, 1996
  7. H. Moon, J. Kim and Y. Kim , 'Measurement of Yield Strength for Electroplated Nickel Film Using Microcantilever,' KIEE International Trans. on EA, No. 5, 4-C pp. 247, 2004
  8. K. P. Larsen, A. A. Rasmussen, J. T. Ravnkilde, M. Ginnerup and O. Hansen, 'MEMS device for bending test: measurements of fatigue and creep of electroplated nickel,' Sensors and Actuators A: Phys., Issues. 1-2, 103 pp. 156, 2003
  9. H. Kawata, J. Tabata, M. Yasuda, and K. Murata, 'Long Ni cantilever fabrication with new sacrificial process,' Jpn. J. Appl. Phys. 41 pp. 4327, 2002
  10. L. S. Stephens, K. W. Kelly, S. Simhadri, A. B. McCandless, and E. I. Meletis, 'Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts,' J. Microelectromechanical Systems, Issue. 3, pp. 347, Oct 2001
  11. E. Mazza, S. Abel, and J. Dual, 'Experimental determination of mechanical properties of Ni and Ni-Fe microbars,' Microsystem Technologies, pp. 197, Feb. 1996
  12. T. Christenson, T. Buchheit, D. Schmale, and R. Bourcier, 'Mechanical and metallographic characterization of LIGA fabricated nickel and 80%Ni-20%Fe permalloy,' Proc. MRS Symposium, 518 pp. 185, 1998
  13. D. J. Inman, Vibration with control measurement and stability (Prentice-Hall, Eaglewood Cliffs N.J., International ed., Chap. 1, pp. 4.A. Books, 1989

피인용 문헌

  1. Fabrication of two types of micro ion sources for a micro time-of-flight mass spectrometer vol.17, pp.8, 2007, https://doi.org/10.1088/0960-1317/17/8/017
  2. Effect of Duty Cycle on Atmospheric Plasma Generation using Micromachined Electrodes vol.48, pp.4, 2009, https://doi.org/10.1143/JJAP.48.04C196