Journal of Korean Ophthalmic Optics Society (한국안광학회지)
- Volume 12 Issue 3
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- Pages.77-81
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- 2007
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- 1226-5012(pISSN)
Determination of Optical Constants of TiNx was Sputtered with RF Magnetron Sputtering Method
RF 마그네트론 스퍼터링 방법으로 증착한 TiNx 박막의 광학상수 결정
- Park, Myung Hee (Institute of NT.IT Fusion Technology, Ajou University) ;
- Kim, Sang Yong (Institute of NT.IT Fusion Technology, Ajou University) ;
- Lee, Soonil (Devision of Energy Systems Research, Ajou University) ;
- Koh, Ken Ha (Devision of Energy Systems Research, Ajou University)
- Received : 2007.05.23
- Published : 2007.07.31
Abstract
We sputtered
금속테의 황색도금물질로 사용되는 티타늄질화물(titanium nitride:
Keywords