Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Development of a Hot-Embossing Process using Ceramic Glass Molds for Polymer Micro Structures

글라스 주형을 이용한 폴리머 미세 형상 핫-엠보싱 공정 연구

  • 김주한 (서울산업대학교 기계공학과) ;
  • 신기훈 (서울산업대학교 기계공학과)
  • Published : 2007.12.15
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Abstract

A ceramic glass mold was developed for micro hot-embossing and replicated polymer parts are fabricated. The glass-ceramic micro mold could be fabricated with a laser process and a wet etching process and the fabrication time could be saved a lot. Various polymer micro structures can be obtained by hot-embossing. The process parameters such as ho-embossing temperatures or pressures were investigated and optimized. This process can be applied for fabrication of micro structures for flip-chips or micro fluidic channels for bio-engineering. The advantages and disadvantages of this process are discussed, too.

Keywords

References

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