반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

FPD용 노광 스테이지의 통합 제어시스템 구현

Implementation of Exposure Stage Integrated Control System for FPD

  • 김종원 (한국기술교육대학교 전기전자공학과) ;
  • 서재용 (한국기술교육대학교 전기전자공학과) ;
  • 조현찬 (한국기술교육대학교 전기전자공학과) ;
  • 조태훈 (한국기술교육대학교 전기전자공학과) ;
  • 강흥석 ((주) OFT)
  • Kim, Jong-Won (Depart of Electrical and Electronics Eng, Korea University of Technology and Education) ;
  • Seo, Jae-Yong (Depart of Electrical and Electronics Eng, Korea University of Technology and Education) ;
  • Cho, Hyun-Chan (Depart of Electrical and Electronics Eng, Korea University of Technology and Education) ;
  • Cho, Tai-Hoon (Depart of Electrical and Electronics Eng, Korea University of Technology and Education) ;
  • Kang, Heung-Seok (OFT)
  • 발행 : 2006.12.31
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초록

Expose equipment system that is used for manufacturing process of Flat Panel Display, is most important equipment in whole process. Expose equipment that is for making pattern of mask on substrate, consists of optical part, stage part and transport part. The stage is an important part that aligns mask and substrate for delivering pattern of mask to substrate exactly. In this paper, control system of expose stage that is able to use mask and substrate of diverse size, with PC controller using GUI interface instead of PLC control system. The existing PLC control system does not have the suitable structure for using mask of diverse size. GUI interface integration control system is based on PC. So it has the advantage of convenient use and active operation. We embodied PLC control system in integration control system based on PC, and verified utility possibility through the standard test course.

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